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A Study on the Microstructure of Preferred Orientation of Lead Zirconate Titanate (PZT) Thin Films

Published online by Cambridge University Press:  31 January 2011

Chang Jung Kim ,
Dae Sung Yoon ,
Joon Sung Lee ,
Chaun Gi Choi  and
Kwangsoo No
Chang Jung Kim
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Kuseong Dong 373–1, Yusung Gu, Taejon, Korea
Dae Sung Yoon
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Kuseong Dong 373–1, Yusung Gu, Taejon, Korea
Joon Sung Lee
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Kuseong Dong 373–1, Yusung Gu, Taejon, Korea
Chaun Gi Choi
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Kuseong Dong 373–1, Yusung Gu, Taejon, Korea
Kwangsoo No
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Kuseong Dong 373–1, Yusung Gu, Taejon, Korea
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Abstract

The lead zirconate titanate (PZT) thin films were fabricated using sol-gel spin coating onto Pt/Ti/glass substrates. Effects of the holding time for pyrolysis and the coating cycle on the preferred orientation of the PZT thin films were studied. The films were fabricated with different coating cycles (3, 5, 7, 9, 11), dried at 330 °C for different holding times (5, 30, 60 min), and then annealed at the same temperature of 650 °C using rapid thermal annealing (RTA). The preferred orientations of the films were investigated using x-ray diffraction and glancing angle x-ray diffraction. The microstructure and the selected area diffraction pattern of the PZT thin films were also investigated using scanning electron microscopy (SEM) and transmission electron microscopy (TEM), respectively.

Type
Articles
Information
Journal of Materials Research , Volume 12 , Issue 4 , April 1997 , pp. 1043 - 1047
Copyright
Copyright © Materials Research Society 1997

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