Hostname: page-component-7bb8b95d7b-qxsvm Total loading time: 0 Render date: 2024-09-26T23:55:03.170Z Has data issue: false hasContentIssue false
  • English
  • Français

Processing and characterization of Pb(Zr, Ti)O3 films, up to 10 μm thick, produced from a diol sol-gel route

Published online by Cambridge University Press:  31 January 2011

Y. L. Tu  and
S. J. Milne
Y. L. Tu
Affiliation:
School of Materials, University of Leeds, Leeds LS2 9JT, United Kingdom
S. J. Milne
Affiliation:
School of Materials, University of Leeds, Leeds LS2 9JT, United Kingdom
Get access

Abstract

A recently developed diol sol-gel route has been modified in order to produce multilayer PbZr0.53Ti0.47O3 films on platinized sapphire substrates. Up to 20 depositions of a 1.1 M sol were carried out leading to a final film thickness of 10 μm. A similar thickness could be achieved from 12 coatings of a more concentrated 1.6 M sol. Decomposition and crystallization of the multilayer coatings were performed using a two-stage prefiring sequence, at 350 °C and 600 °C, followed by a final firing step at 700 °C. Ferroelectric remanant polarization increased with increasing film thickness to a value of 40 μC cm−2 for a 10 μm film, with a corresponding coercive field of 30 kV cm−1; the relative permittivity of this film was ∼1000 and the dissipation factor 0.04. The thickness dependence of relative permittivity could be modeled on a simple series capacitor circuit representing the ferroelectric Pb(Zr, Ti)O3 (PZT) film and low-permittivity interface layers; but other possible contributory factors are also discussed.

Type
Articles
Information
Journal of Materials Research , Volume 11 , Issue 10 , October 1996 , pp. 2556 - 2564
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Scott, J. F. and Paz de Araujo, C.A., Science 246, 1400–1405 (1989).CrossRefGoogle Scholar
2. Sheppard, L. M., Am. Ceram. Soc. Bull. 71 (1), 85–95 (1992).Google Scholar
3. Budd, K. D., Dey, S.K., and Payne, D.A., in Electrical Ceramics, edited by Steele, B. C. H. (Brit. Ceram. Proc. 36, Stoke-on-Trent, Staffs, U.K., 1985), p. 107.Google Scholar
4. Lakeman, C.D.E. and Payne, D. A., J. Am. Ceram. Soc. 75, 3091–3096 (1992).Google Scholar
5. Sanchez, L. E., Dion, D. T., Wu, S. Y., and Naik, I. K., Ferroelectrics 116, 1–17 (1991).CrossRefGoogle Scholar
6. Milne, S. J. and Pyke, S. H., J. Am. Ceram. Soc. 74, 1407–1410 (1991).CrossRefGoogle Scholar
7. Chen, K. C., Janah, A., and Mackenzie, J.D., in Better Ceramics through Chemistry II, edited by Brinker, C. J., Clark, D. E., and Ulrich, D. R. (Mater. Res. Soc. Symp. Proc. 73, Pittsburgh, PA, 1986), p. 731.Google Scholar
8. Tohge, N., Takahashi, S., and Minami, T., J. Am. Ceram. Soc. 74, 67–71 (1991).Google Scholar
9. Yi, G., Wu, Z., and Sayer, M., J. Appl. Phys. 64, 2717–2723 (1988).CrossRefGoogle Scholar
10. Yi, G. and Sayer, M., in Proc. 8th IEEE Int. Symp. on Application of Ferroelectrics, edited by Liu, M., Safari, A., Kingon, A., and Haertling, G. (IEEE, New York, 1992), p. 289.Google Scholar
11. Kwok, C. K., Desu, S. B., and Vijay, D. P., Ferroelectrics Lett. 16, 143–156 (1993).CrossRefGoogle Scholar
12. Haertling, G. H., Integrated Ferroelectrics 3, 207–215 (1993).Google Scholar
13. Haertling, G. H., Am. Ceram. Soc. Bull. 73 (8), 68–73 (1994).Google Scholar
14. Chen, H. D., Udayakumar, K.R., Gaskey, C.J., and Cross, L.E., “Fabrication and piezoelectric properties of PZT-based ferroelectric thick films”, Am. Ceram. Soc. Annual Meeting, Cincinnati, OH, April 30–May 3, 1995.Google Scholar
15. Phillips, N. J., Calzada, M. L., and Milne, S. J., J. Non-Cryst. Solids 147 & 148, 285–290 (1992).CrossRefGoogle Scholar
16. Calzada, M. L. and Milne, S. J., J. Mater. Sci. Lett. 12, 1221–1223 (1993).CrossRefGoogle Scholar
17. Tu, Y. L. and Milne, S.J., J. Mater. Sci. 30, 2507–2516 (1995).CrossRefGoogle Scholar
18. Tu, Y. L., Calzada, M. L., Phillips, N. J., and Milne, S. J., J. Am. Ceram. Soc. 79, 441–448 (1996).CrossRefGoogle Scholar
19. Kwok, C. K. and Desu, S. B., Appl. Phys. Lett. 60, 1430–1432 (1992).CrossRefGoogle Scholar
20. Carim, A. H., Tuttle, B.A., Doughty, D.H., and Martinez, S.L., J. Am. Ceram. Soc. 74, 1455–1458 (1991).Google Scholar
21. Myers, S. A. and Chapin, L.N., in Ferroelectric Thin Films, edited by Myers, E.R. and Kingon, A.I. (Mater. Res. Soc. Symp. Proc. 200, Pittsburgh, PA, 1990), p. 231.Google Scholar
22. Fox, G. R., Troiler-McKinstry, S., Krupanidhi, S.B., and Casas, L.M., J. Mater. Res. 10, 1508–1515 (1995).Google Scholar
23. Powder Diffraction File, Card No. 17–64, Joint Committee on Powder Diffraction Standards, Swarthmore, PA, 1979.Google Scholar
24. Tani, T., Xu, Z., and Payne, D. A., in Ferroelectric Thin Films III, edited by Myers, E.R., Tuttle, B.A., Desu, S. B., and Larsen, P.K. (Mater. Res. Soc. Symp. Proc. 310, Pittsburgh, PA, 1993), p. 269.Google Scholar
25. Olowolate, J. O., Jones, R. E. Jr.., Campbell, A. C., Hedge, R. I., Mogab, C. J., and Gregory, R.B., J. Appl. Phys. 73, 1764–1772 (1993).CrossRefGoogle Scholar
26. Powder Diffraction File, Card No. 17–680, Joint Committee on Powder Diffraction Standards, Swarthmore, PA, 1979.Google Scholar
27. Chen, S. Y. and Chen, I.W., J. Am. Ceram. Soc. 77, 2337–2344 (1994).Google Scholar
28. Ogawa, T., Senda, A., and Kasanami, T., Jpn. J. Appl. Phys. 30 (9B), 2145–2148 (1991).Google Scholar
29. Amanuma, K., Mori, T., Hase, T., Sakuma, T., Ocui, A., and Miyasaka, Y., Jpn. J. Appl. Phys. 32, 1150–1152 (1993).CrossRefGoogle Scholar
30. Lakeman, C. D. E., “Thermal processing and the evolution of composition and structure and properties for sol-gel derived PZT thin layer”, Ph.D. Thesis, University of Illinois at Urbana–Champaign (1994).Google Scholar
31. Yi, G., Wu, Z., Sayer, M., Jen, C. K., and Bussiére, J. F., in Ceramic Thin and Thick Films, edited by Hiremath, B. V. (Ceram. Trans., Westerville, OH, 1990), 11, p. 363.Google Scholar
32. Larsen, P. K., Vormans, G.J.M., Taylor, D. J., and van Veldhoven, P. J., J. Appl. Phys. 76, 2405–2413 (1994).CrossRefGoogle Scholar
33. Reaney, I. M., Brooks, K., Klissurska, R., Pawlaczyk, C., and Setter, N., J. Am. Ceram. Soc. 77, 1209–1216 (1994).Google Scholar
34. Jaffe, B., Cook, W. R., and Jaffe, H., Piezoelectric Ceramics (Academic Press, London, 1971).Google Scholar