No CrossRef data available.
Article contents
Micro-System Displacement and Profile Measurement By an Integrated Photon Tunneling and Confocal Microscope
Published online by Cambridge University Press: 05 May 2011
Abstract
An integrated optical method for measuring deformation of micro-mechanical systems with better than sub-micron resolutions is detailed. Both a confocal laser scanning microscope and a photon tunneling microscope were integrated into a single microscopy system due to their complimentary capabilities for examining sub-micrometer deformations. A halogen lamp and laser were adopted as the two light sources for the measurements. Since topographic information of samples up to a 15μm by 15μm area can be measured, a three-dimensional displacement field of the sample was extracted by comparing topographies of the same specimen area before and after deformation. The bending and twisting deformation of a micro-mirror driven by the electrostatic force was measured to demonstrate the capability of this newly developed instrument. The experimental data obtained agrees reasonably well with the theoretical results calculated by adopting an analytical solution and a finite element method. The small discrepancy in the result can be traced to the surface roughness effect, which is often non-negligible in micro-systems.
- Type
- Articles
- Information
- Copyright
- Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2002
References
REFERENCES
1Chu, W. H., Mehregany, M. and Mullen, B. H., “Analysis of tip deflection and force a bimetallic microactuator,” J. Micromech. Microeng., 3, pp. 4–7 (1993).CrossRefGoogle Scholar
2Chung, S. W. and Kim, Y. K., “Design and fabrication of 10 × 10 micro-apatial light modulator array for phase and amplitude modulation,” Sens. Actuators A, 78(1), pp. 63–70 (1999).CrossRefGoogle Scholar
3Krishnamoorthy, U., Li, K., Yu, K., Lee, D., Heritage, J. P. and Solgaard, O., “Dual-mode micromirrors for optical phased array applications,” Sens. Actuators A, 97–98, pp. 21–26 (2002).CrossRefGoogle Scholar
4Buhler, J., Funk, J., Korvink, J. G., Steiner, F. P., Sarro, P. M. and Baltes, H., “A silicon resonant sensor structure for Coriolis mass-flow measurements,” J. Microelectromech. Syst., 6(2), pp. 126–135 (1997).CrossRefGoogle Scholar
5Zavracky, P. M., Majumber, S. and McGrruer, E., “Micromechanical switches fabricated using nickel surface micromachining,” J. Microelectromech. Syst., 6(1), pp. 3–9 (1997).CrossRefGoogle Scholar
6Strozewski, K. J., Wang, C. Y., Wetsel, G. C. Jr., Boysel, R. M. Jr. and Florence, J. M. Jr., “Optical power induced damage to microelectromechanical mirrors,” J. Appl. Phys., 73, pp. 7125–7128 (1993).CrossRefGoogle Scholar
7Chung, S. W., Shin, J. W., Kim, Y. K. and Han, B. S., “Design and fabrication of micromirror supported by electroplated nickel posts,” Sens. Actuators A, 54(1-3), pp. 464–467 (1996).CrossRefGoogle Scholar
8Min, Y.-H. and Kim, Y.-K., “Modeling, design, fabrication and measurement of a single layer polysilicon micro-mirror with initial curvature compensation,” Sens. Actuators A, 78(1), pp. 8–17 (1999).CrossRefGoogle Scholar
9Fischer, M., Giousouf, M., Schaepperle, J., Eichner, D., Weinmann, M., von Munch, W. and Assmus, F., “Electrostatically deflectable polysilicon micromirrors-dynamic behaviour and comparison with the results from FEM modeling with ANSYS,” Sens. Actuators A, 67(1-3), pp. 89–95 (1998).CrossRefGoogle Scholar
10Degani, O., Socher, E., Lipson, A., Leitner, T., Setter, D. J., Kaldor, S. and Nemirovsky, Y., “Pull-in study of an electrostatic torsion microactuator,” J. Microelectromech. Syst., 7(4), pp. 373–379 (1998).CrossRefGoogle Scholar
11Shin, J. W., Chung, S. W., Kim, Y. K. and Choi, B. K., “Silicon mirror arrays fabricated by using bulk- and surface micromachining,” Sens. Actuators A, 66(1-3), pp. 144–149 (1998).CrossRefGoogle Scholar
12Guerra, J. M., “Photon tunneling microscopy,” Applied Optics, 29(26), pp. 3741–3752 (1990).CrossRefGoogle ScholarPubMed
13Wilson, T. and Sheppard, C. J. R., Theory and Practice of Scanning Optical Microscopy, Academic Press, London, UK (1984).Google Scholar
14Fang, W. and Wickert, J. A., “Determining mean and gradient residual stresses in thin films using micromachined cantilevers,” J. Micromech. Microeng., 6, pp. 301–309 (1996).CrossRefGoogle Scholar
15Fang, W. and Wickert, J. A., “Comments on measuring thin-film stresses using bilayer micromachined beams,” J. Micromech. Microeng., 5, pp. 276–281(1995).CrossRefGoogle Scholar
16Chu, T. C., Ranson, W. F., Sutton, M. A. and Peters, W. H., “Applications of digital image-correlation techniques to experimental mechanics,” Experimental Mechanics, 25(3), pp. 232–244 (1985).CrossRefGoogle Scholar
17Meng, Q., Mehregany, M. and Mullen, R. L., “Theoretical modeling of microfabricated beams with elastically restrained supports,” J. Micro-electromechanical System, 2(2), pp. 128–137 (1993).CrossRefGoogle Scholar
18Cheng, D. K., Field and Wave Electromagnetics, Addison Wesley, Longman, CO, USA (1996).Google Scholar
19Timoshenko, S. P. and Goodier, J. N., Theory of Elasticity, 3rd ed., McGraw-Hill, New York, New York, USA (1970).Google Scholar