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Nonlinear Dynamic Analysis of Micro Cantilever Beam Under Electrostatic Loading

Published online by Cambridge University Press:  22 March 2012

C.-C. Liu ,
S.-C. Yang  and
C.-K. Chen
C.-C. Liu
Affiliation:
Department of Industrial Education and Technology, National Changhua University of Education, Changhua, Taiwan 50007, R.O.C.
S.-C. Yang
Affiliation:
Graduate Institute of Vehicle Engineering, National Changhua University of Education, Changhua, Taiwan 50007, R.O.C.
C.-K. Chen*
Affiliation:
Department of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan 70101, R.O.C.
*
*Corresponding author (ckchen@mail.ncku.edu.tw)
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Abstract

A hybrid differential transformation / finite difference scheme is used to analyze the complex nonlinear behavior of an electrostatically-actuated micro cantilever beam which high aspect ratios (length/width). The validity of the proposed method is confirmed by comparing the numerical results obtained for the tip displacement and pull-in voltage of the cantilever beam with the analytical and experimental results presented in the literature. The hybrid scheme is then applied to analyze both the steady-state and the dynamic deflection behavior of the cantilever beam as a function of the applied voltage. Overall, the results confirm that the hybrid method provides an accurate and computationally-efficient means of analyzing the complex nonlinear behavior of both the current micro cantilever beam system and other micro-scale electrostatically-actuated structures.

Keywords

Pull-in voltageMicro cantilever beamElectrostatic actuatorMEMSHybrid methodDifferential transformation
Type
Articles
Information
Journal of Mechanics , Volume 28 , Issue 1 , March 2012 , pp. 63 - 70
Copyright
Copyright © The Society of Theoretical and Applied Mechanics, R.O.C. 2012

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