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Planarization Processes for Pre-FIB Sample Preparation

Published online by Cambridge University Press:  01 August 2002

T.-C. Lee ,
J.-Y. Huang ,
L.-C. Chen  and
D. H.-I. Su
T.-C. Lee
Affiliation:
Process Failure Analysis Department, Taiwan Semiconductor Manufacturing Company, Ltd., Taiwan, R.O.C.
J.-Y. Huang
Affiliation:
Process Failure Analysis Department, Taiwan Semiconductor Manufacturing Company, Ltd., Taiwan, R.O.C.
L.-C. Chen
Affiliation:
Process Failure Analysis Department, Taiwan Semiconductor Manufacturing Company, Ltd., Taiwan, R.O.C.
D. H.-I. Su
Affiliation:
Process Failure Analysis Department, Taiwan Semiconductor Manufacturing Company, Ltd., Taiwan, R.O.C.

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 564 - 565
Copyright
Copyright © Microscopy Society of America 2002