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Role of Microscopy in Advanced Semiconductor Failure Analysis

Published online by Cambridge University Press:  01 August 2010

XT Tong ,
L Pan ,
B Miner ,
K Johnson ,
S Subramaniam  and
M Sacks
XT Tong
Affiliation:
Intel Corporation
L Pan
Affiliation:
Intel Corporation
B Miner
Affiliation:
Intel Corporation
K Johnson
Affiliation:
Intel Corporation
S Subramaniam
Affiliation:
Intel Corporation
M Sacks
Affiliation:
Intel Corporation

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 798 - 799
Copyright
Copyright © Microscopy Society of America 2010