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Fabrication of ultrathin and flexible graphene-based devices for in vivo neuroprosthetics

Published online by Cambridge University Press:  22 January 2018

Dmitry Kireev ,
Pegah Shokoohimehr ,
Mathis Ernst ,
Viviana Rincón Montes ,
Kagithiri Srikantharajah ,
Vanessa Maybeck ,
Bernhard Wolfrum  and
Andreas Offenhäusser
Dmitry Kireev
Affiliation:
Institute of Bioelectronics (PGI-8/ICS-8), Forschungszentrum Jülich, 52425Jülich, Germany;
Pegah Shokoohimehr
Affiliation:
Institute of Bioelectronics (PGI-8/ICS-8), Forschungszentrum Jülich, 52425Jülich, Germany;
Mathis Ernst
Affiliation:
Institute of Bioelectronics (PGI-8/ICS-8), Forschungszentrum Jülich, 52425Jülich, Germany;
Viviana Rincón Montes
Affiliation:
Institute of Bioelectronics (PGI-8/ICS-8), Forschungszentrum Jülich, 52425Jülich, Germany;
Kagithiri Srikantharajah
Affiliation:
Institute of Bioelectronics (PGI-8/ICS-8), Forschungszentrum Jülich, 52425Jülich, Germany;
Vanessa Maybeck
Affiliation:
Institute of Bioelectronics (PGI-8/ICS-8), Forschungszentrum Jülich, 52425Jülich, Germany;
Bernhard Wolfrum
Affiliation:
Institute of Bioelectronics (PGI-8/ICS-8), Forschungszentrum Jülich, 52425Jülich, Germany; Neuroelectronics, Munich School of Bioengineering, Technical University of Munich (TUM), Germany & BCCN Munich, Boltzmannstr. 11, 85748Garching, Germany
Andreas Offenhäusser*
Affiliation:
Institute of Bioelectronics (PGI-8/ICS-8), Forschungszentrum Jülich, 52425Jülich, Germany;
*
*e-mail: a.offenhaeusser@fz-juelich.de
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Abstract

Graphene based devices have already proven to be extremely sensitive and very useful in a wide spectrum of bioelectronics research. In the manuscript we describe a method to fabricate arrays of graphene-based probes, requiring minimal number of fabrication steps, while maintaining overall device functionality. These polyimide-based probes are approximately 6 µm thick, therefore ultraflexible, yet robust and stable. Devices, such as graphene field effect transistors (GFETs) and graphene multielectrode arrays (GMEAs) have been designed, fabricated and tested for their performance. The flexible GFETs exhibit sensitivity, i.e. transconductance up to 700 µS/V, which an order of magnitude larger compared to typical silicon transistors. Multiple probe per wafer design allows us to fabricate different kinds of devices on one 4-inch wafer, consequently increasing a possible range of applications from e.g. retinal to cortical neuroprosthetics.

Keywords

microelectronicsnanostructurebiomedical
Type
Articles
Information
MRS Advances , Volume 3 , Issue 29: Biomaterials and Soft Materials , 2018 , pp. 1621 - 1627
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Copyright
Copyright © Materials Research Society 2018 

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