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Ion Implantation

Published online by Cambridge University Press:  29 November 2013

S.T. Picraux  and
P.S. Peercy
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Type
Advances in Ion Beam Processing and Synthesis
Information
MRS Bulletin , Volume 12 , Issue 2 , March 1987 , pp. 22 - 30
Copyright
Copyright © Materials Research Society 1987

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References

1. MRS Symposia Proceedings series: Metastable Materials Formation by Ion Implantation, edited by Picraux, S.T. and Choyke, W.J. (Vol. 7, 1982);Google Scholar
Ion implantation and Ion Beam Processing of Materials, edited by Hubler, G.K., Holland, O.W., Clayton, C.R., and White, C.W. (Vol. 27, 1984);Google Scholar
Ion Beam Processes in Advanced Electronic Materials and Device Technology, edited by Appleton, B.R., Eisen, F.H., and Sigmon, T.W. (Vol. 45, 1985);Google Scholar
Beam-Solid Interactions and Phase Transformations, edited by Kurz, H., Olson, G.L. and Poate, J.M. (Vol. 51, 1986); andGoogle Scholar
Semiconductor-on-Insulator and Thin Film Transistor Technology, edited by Chiang, A., Geiss, M.W., and Pfeiffer, L. (Vol. 53, 1986).Google Scholar
2. “Proceedings of the 4th International Conference on Ion Beam Modification of Materials,” Nucl. Instrum. & Methods B7/8 (1985).Google Scholar
3.Surface Alloying by Ion, Electron and Laser Beams, edited by Rehn, L.E., Picraux, S.T., and Wiedersich, H. (American Society for Metals, Metals Park, Ohio, 1987).Google Scholar