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Adsorption and Reaction of TiCl4 on W(100)

Published online by Cambridge University Press:  22 February 2011

Wei Chen  and
Jeffrey T. Roberts
Wei Chen
Affiliation:
University of Minnesota, Department of Chemistry Minneapolis, MN 55455
Jeffrey T. Roberts
Affiliation:
University of Minnesota, Department of Chemistry Minneapolis, MN 55455
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Abstract

The adsorption and reaction of titanium tetrachloride (TiC14) on W(100) was investigated using temperature programmed desorption mass spectrometry (TPRS), x-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy (AES), and low energy electron diffraction (LEED). TiC14 adsorbs molecularly on W(100) at 100 K. Desorption from the molecularly bound state occurs near 220 K. Competing with desorption is dissociation to adsorbed TiCl3, which reacts to form gaseous TiCl4 near 450 K. TiC13 also decomposes into atomically adsorbed Ti and Cl on the surface upon heating to 700 K.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 334: Symposium W – Gas-Phase and Surface Chemistry in Electronic Materials Processing , 1993 , 317
Copyright
Copyright © Materials Research Society 1994

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