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Aerosol Deposition and Film Formation using Silicon Powder

Published online by Cambridge University Press:  28 February 2011

Kamesh V. Gadepally ,
K. B. Tennal ,
R. M. Hawk  and
W. D. Brown
Kamesh V. Gadepally
Affiliation:
University of Arkansas at Little Rock, Department of Electronics and Instrumentation, 2801 S. University, Little Rock, AR 72204
K. B. Tennal
Affiliation:
University of Arkansas at Little Rock, Department of Electronics and Instrumentation, 2801 S. University, Little Rock, AR 72204
R. M. Hawk
Affiliation:
University of Arkansas at Little Rock, Department of Electronics and Instrumentation, 2801 S. University, Little Rock, AR 72204
W. D. Brown
Affiliation:
University of Arkansas, Electrical Engineering Dept., Fayettevllle, AR 72701
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Abstract

An electrostatic deposition process which utilizes charged particle motion in an electric field has been successfully developed as a method for depositing coatings of silicon films. Coatings have been deposited on conducting, Insulating, and semiconducting surfaces after making suitable changes in deposition parameters. This process along with parameters Important to the deposition process which Include particle charge and size characteristics are discussed. These coatings are subsequently heat treated. Experimental results for depositions on silicon substrates are presented. Characterization in terms of chemical, electrical and physical properties of the film are presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 206: Symposium G – Clusters and Cluster-Assembled Materials , 1990 , 91
Copyright
Copyright © Materials Research Society 1991

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References

REFERENCES

1. Kirk, and Othmer, , 1981. Encyclopedia of Chemical Technology, 3rd ed. John Wiley and Sons, Inc., New York, 15, 256 (1981).Google Scholar
2. Rodriguez, F., Principles of polymer systems, 2nd ed., McGraw-Hill, New York, NY, p. 314 (1967).Google Scholar
3. Miller, E. (ed.). Users guide to powder coating, 2nd ed., Society of Manufacturing Engineers, Dearborn, Michigan, (1987).Google Scholar
4. Kumar, K., J. Appl. Phys., 63, 6, p. R13 (1988).Google Scholar
5. Kumar, K. and Petrovltch, A., Proc. of NTSC Conf., 24-27 Oct. Cincinnati. OH, p. 219 (1988).Google Scholar
6. Varacalle, D.J. Jr., Telschow, K.L., Wright, R.N., and Debslkdar, J.C., Proc. of NTSC Conf., 24-27 Oct., Cincinnati. OH, p. 211 (1988).Google Scholar
7. Akani, M., Suryanarayanan, R., and Brun, G., J. Appl. Phys., 60, 1, p. 457 (1986).CrossRefGoogle Scholar
8. Hughes, J.F., J. Electrostatics, 23 p. 3 (1989).Google Scholar
9. Gadepally, K.V., Tennal, K.B., Hawk, R.M., Robles, A. and Griebel, J.A., To be published in the 44th Proceedings of the Arkansas Academy of Science.Google Scholar
10. Runyan, W.R., Silicon Semiconductor Technology, TI Electronics series book, published by McGraw Hill, pp. 77 (1965).Google Scholar
11. Wu, J.J., Flagan, R.C. and Gregory, O.J., Appl. Phys. Lett., 49 (2), 82, (1986).Google Scholar
12. Frenklach, M., and Ting., L., Abstract from the AAAR Conference, October 9–13, Reno/Sparks. Nevada, pp. 106 (1989).Google Scholar
13. Cannon, W.R., Danforth, S.C., Flint, J.H., Haggerty, J.S., and Marra, R.A., J. Am. Ceram. Soc, 65, pp. 324 (1982).Google Scholar
14. Cannon, W.R., Danforth, S.C., Haggerty, J.S., and Marra., R.A., J. Am. Ceram. Soc., 65 (7), 330 (1982).Google Scholar
15. Mahoney, J.F. and Perel, J., Conference record of IEEE-IAS81:44A (Industry Applications Society) pp. 1142 (1981).Google Scholar
16. Wang, H., Ting, L., and Frenklach, M., Abstract Book of American Association of Aerosol Research, (Annual Meeting, June 18–22, Philadelphia, PA 1990), pp. 6.Google Scholar
17. Lunden, M.L., Nguyen, H.V. and Flagan, R.C., Abstract Book of American Association of Aerosol, Research, (Annual Meeting, June 18–22, Philadelphia, PA 1990), pp. 257.Google Scholar