Published online by Cambridge University Press: 17 March 2011
In epitaxial GaN layers on (0001) sapphire, the distance between edge dislocations in sub-grain boundaries is variable. The strain state in such sub-grains is quantitatively measured by processing of HRTEM images. The dislocation core distribution maps and in plane Burgers vectors components are derived from experimental strain tensor by applying the continuum dislocation theorem. For image simulationsthe atomic models of edge dislocations are calculated using a modified Stillinger-Weber potential. It is shown that the strain field extracted from simulated images matches that from experimental ones. The corresponding dislocation density peaks are larger and more splitted than those from simulated images.