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Anomalous Carbon Interdiffusion in a-Si:H/a-SiC:H Multilayers
Published online by Cambridge University Press: 21 February 2011
Abstract
The interdiffusion of carbon in a-Si:H and a-Si1-xCx:H multilayers is measured by analyzing the time evolution of the X-ray diffraction from the superlattices. A time dependent diffusivity D(t)which follows a power law is found. The theoretical analysis shows that such a time dependence, referred to as “dispersive” or “anomalous” diffusion and studied for hydrogen diffusion in the literature, is fundamentally related to the amorphous structure of the material.
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- Copyright © Materials Research Society 1992
References
REFERENCES
[3]
Goebel, H.E., ESC Symp. on “Analytical Tech. for Sem. Mat. and Proc. Char.” joint with ESSDERC, Berlin, Sept. 1989
Google Scholar
[12]
Schirmacher, W. and Wagener, M. in: Festkörperprobleme/Adv. in Sol. St. Phys.
31, ed. by Rõssler, U. (Vieweg, Braunschweig
1991) p. 39
Google Scholar
[13]
Schirmacher, W., Prem, M., Suck, J.-B., and Heidemann, A., Europhys. Lett.
13 (1990) 523
Google Scholar