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Carbon Nanotube Micro-Opto-Mechanical Grippers

Published online by Cambridge University Press:  01 February 2011

Shaoxin Lu ,
Ye Liu ,
Ning Shao  and
Balaji Panchapakesan
Shaoxin Lu
Affiliation:
sxlu@udel.edu, University of Delaware, Department of Electrical and Computer Engineering, 140 Evans Hall,, University of Delaware, Newark, DE, 19716, United States
Ye Liu
Affiliation:
lyalex@udel.edu, University of Delaware, Department of Electrical and Computer Engineering, Newark, DE, 19716, United States
Ning Shao
Affiliation:
ningshao@udel.edu, University of Delaware, Department of Electrical and Computer Engineering, Newark, DE, 19716, United States
Balaji Panchapakesan
Affiliation:
Baloo@eecis.udel.edu, University of Delaware, Department of Electrical and Computer Engineering, Newark, DE, 19716, United States
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Abstract

We report the integration of single wall carbon nanotube ensembles into micro-mechanical systems to realize a new carbon nanotube micro-optomechanical system (CNT-MOMS). CNT-MOM grippers were fabricated with CMOS compatible techniques involving nanotube film formation, wafer bonding, photo-lithography, plasma etching and dry release. MOM-grippers displacement of ∼24μm was obtained from a gripper of 430μm in length under infra-red laser stimulus and continuous operation of more than 100,000 cycles was acquired. The optical power consumption of the gripper operation was estimated to be as small as ∼240μW. This study is a good example of how nano-materials could be integrated into CMOS compatible techniques for applications in high performance MEMS and nanoscale actuation technologies.

Keywords

microelectro-mechanical (MEMS)opticalnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 947: Symposium A – Responsive Soft Matter – Chemistry and Physics for Assemblages, Films and Forms , 2006 , 0947-03-70
Copyright
Copyright © Materials Research Society 2007

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References

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