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Cavitation in Unfired Ceramic Sheets by Pulsed Nd:YAG Laser

Published online by Cambridge University Press:  26 February 2011

Rong-Fuh Louh  and
Relva C. Buchanan
Rong-Fuh Louh
Affiliation:
Department of Materials Science and EngineeringUniversity of Illinois at Urbana-Champaign, Urbana, IL 61801
Relva C. Buchanan
Affiliation:
Department of Materials Science and EngineeringUniversity of Illinois at Urbana-Champaign, Urbana, IL 61801
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Abstract

Single shot pulses from a Nd:YAG laser were used to generate different sized holes and patterns in tape-cast ceramic sheets for electronic packaging applications. The ceramic sheets were based on formulations in the BaTiO3 and MgO-Al2O3-SiO2 systems. The single shot laser pulses were targeted using a computer controlled mirror deflection system and a programmed (cavitation) pattern which could readily be modified. Morphology and structure of the drilled holes before and after sintering were examined by SEM. The surface radial temperature profile resulting from the laser pulse was directly mapped using a lacquer thermocoat. Effects of the laser pulse energy and beam spot size on laser/ceramic interactions and cavitation process were also explored.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 100: Symposium – A Fundamentals of Beam-Solid Interactions and Transient Thermal Processing , 1988 , 659
Copyright
Copyright © Materials Research Society 1988

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References

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