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CeO2 Thin Films as Buffer Layers for Si/YBCO Integrated Microelectronics

Published online by Cambridge University Press:  02 August 2011

Elena Tresso ,
V. Ballarini ,
A. Chiodoni ,
R. Gerbaldo ,
G. Ghigo ,
L. Gozzelino ,
E. Mezzetti ,
B. Minetti ,
C.F. Pirri  and
G. Tallarida
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Elena Tresso
Affiliation:
INFM-UdR ToPoli and Politecnico of Torino (Italy)
V. Ballarini
Affiliation:
INFM-UdR ToPoli and Politecnico of Torino (Italy)
A. Chiodoni
Affiliation:
INFM-UdR ToPoli and Politecnico of Torino (Italy)
R. Gerbaldo
Affiliation:
INFM-UdR ToPoli and Politecnico of Torino (Italy)
G. Ghigo
Affiliation:
INFM-UdR ToPoli and Politecnico of Torino (Italy)
L. Gozzelino
Affiliation:
INFM-UdR ToPoli and Politecnico of Torino (Italy)
E. Mezzetti
Affiliation:
INFM-UdR ToPoli and Politecnico of Torino (Italy)
B. Minetti
Affiliation:
INFM-UdR ToPoli and Politecnico of Torino (Italy)
C.F. Pirri
Affiliation:
INFM-UdR ToPoli and Politecnico of Torino (Italy)
G. Tallarida
Affiliation:
INFM-Laboratorio MDM (Italy)
S. Ferrari
Affiliation:
INFM-Laboratorio MDM (Italy)
C. Camerlingo
Affiliation:
C.N.R., Istituto di Cibernetica, Pozzuoli (Na), (Italy)
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Abstract

The unique properties of superconductors such as radiation hardness and high microwave performances [1-3] make the integration with semiconductor conventional electronics a stimulating challenge. Many attempts have been tried to obtain good quality YBa2Cu3O7-x (YBCO) films on Si substrates, with the aim of taking advantage from the properties of both materials, but interdiffusion reactions and a poor lattice and thermal expansion coefficient matching require the use of a buffer layer at the semiconductor/superconductor interface. Yttria-stabilized zirconia (YSZ), Y2O3, MgO, SrTiO3, CeO2 and their combinations have been proposed and used as buffer layers in the case of Si/YBCO systems. In this paper we report on annealing treatments performed on Si/CeO2 bilayers. A set of optimized samples with deposition temperatures ranging from 100°C to 800°C has been radiatively heated at two different annealing temperatures, in N2 and O2 atmospheres. All the samples have been characterized by X-ray diffraction, Atomic Force Microscopy, micro-Raman spectroscopy. The preferential grain orientation, the lattice parameter, the crystals dimensions, the surface roughness have been studied. As a preliminary tentative, we report on YBCO film growth on the top of CeO2/Si optimized bi-layer before undergoing annealing treatment. This YBCO film resulted to be a-axis preferential oriented, with some contribution of c-axis oriented grains.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 768: Symposium G – Integration of Heterogeneous Thin-Film Materials and Devices , 2003 , G3.9
Copyright
Copyright © Materials Research Society 2003

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