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Characterization of Large Particles in Fumed Silica Based CMP Slurry

Published online by Cambridge University Press:  01 February 2011

W. Scott Rader ,
Timothy Holt  and
Kazusei Tamai
W. Scott Rader
Affiliation:
scottr@fujimico.com, Fujimi Corporation, Tualatin, Oregon, United States
Timothy Holt
Affiliation:
tholt@fujimico.com, Fujimi Corporation, Tualatin, Oregon, United States
Kazusei Tamai
Affiliation:
tamaik@fujimiinc.co.jp, Fujimi Incorporated, Nagoya, Japan
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Abstract

Large particles in fumed silica dispersions were characterized by sedimentation, light scattering techniques, Transmission Electron Microscopy (TEM), and lacunarity. Applying centrifugation to fumed silica dispersions generated differences in sedimentation rates of large particles. The sedimentation rates of the large particles were affected by morphological differences and the particles remaining in the supernatant displayed buoyant behavior. The large particle morphology varied from branch like aggregates containing large primary particles to particles comprised of highly coalesced, tightly packed small primary particles. The results indicate the presence of different types of large particles in fumed silica dispersions to which conventional large particle characterization is unable to distinguish.

Keywords

slurrynanostructuremorphology
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1249: Symposia E/F – Advanced Interconnects and Chemical Mechanical Planarization for Micro-and Nanoelectronics , 2010 , 1249-E04-08
Copyright
Copyright © Materials Research Society 2010

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