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Competitive Reactions in Unicomponent/Bicomponent Contact Systems

Published online by Cambridge University Press:  25 February 2011

M. Eizenberg
M. Eizenberg*
Affiliation:
Department of Materials Engineering and the Solid State Institute, Technion - Israel Institute of Technology, Haifa 32000, Israel.
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Abstract

The advance of microelectronic devices has emphasized the important role of contact metallization. Contacts have become more and more complex in their structure. In this review we present some of our work on three different types of contact systems consisting of a unicomponent/bicomponent interface. The systems are: 1) alloy films (codeposited two metals) on Si, 2) a metal on Si1-xGex epilayers, and 3) a metal on a compound semiconductor (GaAs). Due to applied heat-treatments, competitive interfacial reactions take place between the various constituents of the contacts. These interfacial reactions can affects the properties of the contacts and their stability and reliability.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 260: Symposium C – Advanced Metallization and Processing for Semiconductor Devices and Circuits , 1992 , 841
Copyright
Copyright © Materials Research Society 1992

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