Hostname: page-component-586b7cd67f-vdxz6 Total loading time: 0 Render date: 2024-11-29T11:46:18.712Z Has data issue: false hasContentIssue false
  • English
  • Français

The Composition Dependence of the Interdiffusivity in Artificial Amorphous Si/Ge Multilayers

Published online by Cambridge University Press:  26 February 2011

S. M. Prokes  and
F. Spaepen
S. M. Prokes
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138
F. Spaepen
Affiliation:
Division of Applied Sciences, Harvard University, Cambridge, MA 02138
Get access

Abstract

The interdirfusivity in artificial amorphous Si/Ge multilayers is found to be strongly dependent on the average composition of the films. The interdirfusivity of films with different average composition was determined from the decay of the first X-ray satellite. The nonlinear diffusion resulting from the composition dependence was observed by the evolution of the higher-order satellites.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 77: Symposium D – Interfaces, Superlattices, and Thin Films , 1986 , 305
Copyright
Copyright © Materials Research Society 1987

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Polk, D.E., J. Non-Cryst. Sol. 5, 365 (1971).CrossRefGoogle Scholar
2. Liu, P.L., Yen, R., Bloembergen, N. and Hodgson, R.T., Appl. Phys. Lett. 24, 864 (1979).CrossRefGoogle Scholar
3. Donovan, E.P., Spaepen, F., Turnbull, D., Poate, J.M. and Jacobson, D.C., J. Appl. Phys. 572, 1795 (1985).CrossRefGoogle Scholar
4. Prokeš, S.M., and Spaepen, F., Appl. Phys. Lett, 42, 234 (1985).CrossRefGoogle Scholar
5. Prokeš, S.M., and Spaepen, F., Mat. Res. Soc. Symp. Proc. 56, 383 (1986).Google Scholar
6. Frank, W., Gösele, U., Mehrer, H. and Seeger, A., in Diffusion in Crystalline Solids, edited by Murch, G.E. and Nowick, A.S. (Academic Press, New York, 1985).Google Scholar
7. Janot, C., Bruson, A. and Marchai, G., J. de Phys. 42, 1751 (1986).Google Scholar
8. Janot, C., Roth, M., Marchai, G., Piecuch, M. and Bruson, A., J. Non-Cryst. Sol. 81, 41 (1986).CrossRefGoogle Scholar
9. Persans, P.D., Rupert, A.F., Abeles, B. and Tiedje, T., Phys. Rev. B 32, 5558 (1985).Google Scholar
10. Persans, P.D. and Rupert, A.F., Mat. Res. Soc. Symp. Proc. 57 (1987), in press.Google Scholar
11. de Fontaine, D., Ph.D. thesis, Northwestern University, 1967.Google Scholar
12. Tsakalakos, T., Scripta Met. 20, 470 (1986).CrossRefGoogle Scholar
13. For a review see Greer, A.L. and Spaepen, F., in Synthetic: Modulated Structura Materials, edited by Chang, L.L. and Giessen, B.C. (Academic Press, New York, 1985), p. 419.Google Scholar
14. Spaepen, F., Greer, A.L., Kelton, K.F., and Bell, J.L., Rev. Sci. Instr. 56, 1343 (1985).Google Scholar
15. Tsakalakos, T., Ph.D. thesis, Northwestern University, 1977.Google Scholar