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Depth Sensing Indentation of Thin Hard Films: A Study of Modulus Measurement Sensitivity to Indentation Parameters

Published online by Cambridge University Press:  10 February 2011

Nigel M. Jennett  and
Jan Meneve
Nigel M. Jennett
Affiliation:
National Physical Laboratory UK, Centre for Materials Measurement and Technology, Teddington Middlesex UK, TWI I OLW, nigel.jennett@npl.co.uk
Jan Meneve
Affiliation:
Flemish Institute for Technological Research, Materials Technology Centre, Boeretang 200, Mol, B-2400, Belgium.
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Abstract

The sensitivity of modulus measured by traceably calibrated Depth Sensing Indentation (DSI) is investigated as a function of the indentation parameters: maximum load; loading rate; hold time at maximum load; and single vs. repeated loading. Other issues, including instrument compliance, indenter area function and in-plane anisotropy are also discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 522: Symposium T – Fundamentals of Nanoindentation & Nanotribology , 1998 , 239
Copyright
Copyright © Materials Research Society 1998

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References

1. Oliver, W C and Pharr, G M, J Mater. Res., 7 (1992) 1564 Google Scholar
2. Meneve, J, Smith, J F, Jennett, N M and Saunders, S R J, Applied Surface Science, 100/101 (1996) 64.Google Scholar
3. Jennett, N M; Shafirstein, G; Saunders, S R J. in Hardness Testing in Theory and Practice Proc. 9th Int. Symp. Hardness Testing in Theory and Practice, Düsseldorf, Nov 1995 VDI Berichte, 1194 pp201–210 Publ. VDI-Verlag GmbH, Dusseldorf, 1995 Google Scholar
4. “Development and Validation of Test Methods for Thin Hard Coatings - FASTE”, European Commission, Contract No MAT I -CT94-0045, mid-term report, Task E2.Google Scholar
5. NPLFIT is a suite of routines for fitting polynomial and spline curves to univariate data, with or without weights, with a choice of fitting criterion, e.g., least-squares or ‘minimax’. For details, contact Prof M G Cox, NPL, Scientific Software Section.Google Scholar
6. For details of the prototype NPLFIT evaluation routines in MATLAB function format, contact: N M Jennett, NPL Centre for Materials Measurement and Technology.Google Scholar
7. “Development and Validation of Test Methods for Thin Hard Coatings - FASTE”, European Commission, Contract No MAT 1 -CT94-0045, final report, Task E.Google Scholar
8. Tabor, David in Microindentation Techniques in Materials Science and Engineering, Edited by Blau, and Lawn, (ASTM, STP 889, Philadelphia, 1985,) pp. 129–159 Google Scholar
9. Saunders, S R J; Shafirstein, G; McCormick, N J; Jennett, N M; Hall, D J; Meneve, J. “Recent Developments in Hardness Testing - Use of Nanoindentation.” Comm. Eur. Communities DGXII (Measurement and Testing Programme) Report EUR 15707ENGoogle Scholar
10. Saunders, S R J and Vetters, H R, Thin Solid Films, 299 (1997) 82 Google Scholar
11. Shafirstein, G, Gee, M G, Osgerby, S and Saunders, S R J, (Mater. Res. Soc. Proc. 356 Pittsburgh, PA, 1995) pp. 717 Google Scholar