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Development of Electrostatic Actuated Nano Tensile Testing Device for Mechanical and Electrical Characteristics of FIB Deposited Carbon Nanowire

Published online by Cambridge University Press:  01 February 2011

Mario Kiuchi ,
Shinji Matsui  and
Yoshitada Isono
Mario Kiuchi
Affiliation:
rm003989@se.ritsumei.ac.jp, Ritsumeikan University, Graduate School of Science and Engineering, 1-1-1 Nojihigashi, Kusatsu, Shiga, 525-8577, Japan
Shinji Matsui
Affiliation:
matsui@lasti.u-hyogo.ac.jp, University of Hyogo, Laboratory of Advanced Science and Technology for Industry, 3-1-2 Koto, Kamigori, Ako, Hyogo, 678-1201, Japan
Yoshitada Isono
Affiliation:
isono@se.ritsumei.ac.jp, Ritsumeikan University, Department of Micro System Technology, Faculty of Science and Engineering, 1-1-1 Nojihigashi, Kusatsu, Shiga, 5258577, Japan
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Abstract

This research develops Electrostatic Actuated NAno Tensile testing devices (EANATs) to evaluate mechanical and electrical properties of carbon nanowires fabricated by focus ion beam- assisted chemical vapor deposition (FIB-CVD). This research carried out nanoscale uniaxial tensile tests for 90 nm- to 150 nm-diametric carbon nanowires using EANATs. Young's modulus of cabon nanowires averaged 58 GPa, which was close to that of hydrogenated diamond-like carbon films. On average, fracture stress and strain of carbon nanowires reached values of 4.2 GPa and 0.08, respectively. This research also measured I-V characteristics of 100 nm-diametric carbon nanowires under tensile loading to reveal the piezo resistivity of nanowires. The piezoresistive effect of carbon nanowire was observed. The tensile load was about 0.75 GPa at maximum value of the resistance change.

Keywords

piezoelectricnanoscaleion-beam assisted deposition
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 924: Symposium Z – Mechanics of Nanoscale Materials and Devices , 2006 , 0924-Z04-12
Copyright
Copyright © Materials Research Society 2006

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