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Development Trends in The Direction of Rapid Isothermal Processing (Rip) Dominated Silicon Integrated Circuit Fabrication

Published online by Cambridge University Press:  28 February 2011

R. Singh  and
J. Nulman
R. Singh
Affiliation:
School of Electrical Engineering and Computer Science, University of Oklahoma, Norman, OK 73019
J. Nulman
Affiliation:
AG Associates, 1325 Borregas Ave., Sunnyvale, CA 94089
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Abstract

This paper summarizes the development in the direction of rapid isothermal processing (RIP) dominated silicon integrated circuit fabrication technology.

Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 71: Symposium F – Materials Issues in Silicon Integrated Circuit Processing , 1986 , 441
Copyright
Copyright © Materials Research Society 1986

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