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Diamond Growth on (a) Large Mo Cylinders at 30 Torr and (b) Flat Mo at One Atmospheric Pressure of H2 and CH4

Published online by Cambridge University Press:  10 February 2011

R. Ramesham  and
M. F. Rose
R. Ramesham
Affiliation:
Space Power Institute, 231 Leach Center, Auburn University, Auburn, AL 36849-5320
M. F. Rose
Affiliation:
Space Power Institute, 231 Leach Center, Auburn University, Auburn, AL 36849-5320
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Abstract

(a) Polycrystalline diamond films have been grown on cylindrical Mo substrates by hot filament and microwave plasma CVD techniques using a gas mixture of hydrogen and methane. A single hot tungsten filament has been used to demonstrate the growth of adherent diamond films on large cylinders. To our knowledge this is the first report on such large cylindrical substrate (area: 41 cm2 ) using a single filament of active length of 3.75 cm. (b) Polycrystalline diamond films have been deposited by hot-filament technique for the first time using methane and hydrogen at an atmospheric pressure of hydrogen on flat substrates. The diamond growth has been performed at various pressures ranging from 34.5 to 750 Torr. The as-deposited films were analyzed by SEM and Raman to determine morphology and chemical nature, respectively.

A. Growth of Diamond Film on Molybdenum Cylinders

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 441: Thin Films – Structure and Morphology , 1996 , 659
Copyright
Copyright © Materials Research Society 1997

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