Hostname: page-component-586b7cd67f-t7czq Total loading time: 0 Render date: 2024-11-25T17:59:51.185Z Has data issue: false hasContentIssue false
  • English
  • Français

Diamond-Like Films Obtained by Sputtering from a Glassy Carbon Target

Published online by Cambridge University Press:  21 February 2011

E. Niemann ,
R. Herkert  and
D. Leidich
E. Niemann
Affiliation:
AEG-Research Institute, Goldsteinstraße 235, D-6000 Frank-furt/ M. 71, FRG
R. Herkert
Affiliation:
AEG-Research Institute, Goldsteinstraße 235, D-6000 Frank-furt/ M. 71, FRG
D. Leidich
Affiliation:
AEG-Research Institute, Goldsteinstraße 235, D-6000 Frank-furt/ M. 71, FRG
Get access

Abstract

Diamond-like a-C:H films were obtained by reactive dc-magnetron sputtering from a glassy carbon target in an argon-hydrogen atmosphere. To our knowledge, this is the first time that glassy carbon is used as target material. The a-C:H films are transparent and hard. The a-C:H films can be used as protection and antireflection coatings on a-Si:H photoreceptors. The electrical, optical and structural properties of the a-C:H films are examined.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 152: Symposium H – Optical Materials: Processing and Science , 1989 , 15
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Dischler, B., Bubenzer, A., Koidl, P., Solid State Commun. 48 (2), 105 (1983)Google Scholar
[2] Grill, A., Meyerson, B., Patel, V., J. Mater. Res. 3 (2), 214 (1988)Google Scholar
[3] Nitta, S., Nonomura, S., Tagaki, R., Kojima, N., Yasuda, A., J. of Non-Cryst. Sol. 97 + 98, 1451 (1987)Google Scholar
[4] McKenzie, D. R., Botten, L. C., McPhedran, R. C., Phys. Rev. Lett. 51 (4), 280 (1983)Google Scholar
[5] Hiraki, A., Kawano, T., Kawakami, Y., Solid State Commun. 50 (8), 713 (1984)Google Scholar
[6] Beyer, W. (private communication)Google Scholar
[7] Wild, Ch., Koidl, P., Appl. Phys. Lett. 51 (19), 1506 (1987)CrossRefGoogle Scholar