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Diamond-Like Films Obtained by Sputtering from a Glassy Carbon Target

Published online by Cambridge University Press:  21 February 2011

E. Niemann ,
R. Herkert  and
D. Leidich
E. Niemann
Affiliation:
AEG-Research Institute, Goldsteinstraße 235, D-6000 Frank-furt/ M. 71, FRG
R. Herkert
Affiliation:
AEG-Research Institute, Goldsteinstraße 235, D-6000 Frank-furt/ M. 71, FRG
D. Leidich
Affiliation:
AEG-Research Institute, Goldsteinstraße 235, D-6000 Frank-furt/ M. 71, FRG
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Abstract

Diamond-like a-C:H films were obtained by reactive dc-magnetron sputtering from a glassy carbon target in an argon-hydrogen atmosphere. To our knowledge, this is the first time that glassy carbon is used as target material. The a-C:H films are transparent and hard. The a-C:H films can be used as protection and antireflection coatings on a-Si:H photoreceptors. The electrical, optical and structural properties of the a-C:H films are examined.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 152: Symposium H – Optical Materials: Processing and Science , 1989 , 15
Copyright
Copyright © Materials Research Society 1989

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References

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