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Direct Writing of 3D Microstructures Using a Scanning Laser System
Published online by Cambridge University Press: 01 February 2011
Abstract
In this paper, a new revolutionary 3D manufacturing approach to rapid processing of 3D microstructures in both soft (SU-8) and rigid (Si) materials is introduced. This technique facilitates very fast prototyping without the need of masks, resulting in a low-cost, short-turnaround flexible fabrication process.
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- Copyright © Materials Research Society 2004