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The Effect of Fatigue on the Adhesion and Subcritical Debonding of Benzocyclobutene/Silicon Dioxide Interfaces

Published online by Cambridge University Press:  17 March 2011

Jeffrey M. Snodgrass  and
Reinhold H. Dauskardt
Jeffrey M. Snodgrass
Affiliation:
Department of Materials Science and Engineering, Stanford University Stanford, CA 94305-2205, USA
Reinhold H. Dauskardt
Affiliation:
Department of Materials Science and Engineering, Stanford University Stanford, CA 94305-2205, USA
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Abstract

The effect of fatigue loading on microelectronic thin film interfaces has until now been difficult to quantify. Most industrial fatigue testing uses HAST (Highly Accelerated Stress Testing) protocols, which inherently convolutes the effects of mechanical fatigue and the test environment. Our work focuses on isolating the deleterious effects of mechanical fatigue on interfaces, which we have found to be substantial. In this study, the integrity of a low-k polymer interface involving benzocyclobutene (BCB) and silica was examined under a variety of loading conditions. Critical (fast fracture) adhesion values were measured using standard interface fracture-mechanics geometries. Experiments were then conducted to measure the debond growth rate as a function of the applied strain energy release rate under both static and cyclic loading conditions. Our results show that even under room temperature conditions, debond growth rates measured under cyclic fatigue are considerably faster than those observed under static loading. Results are presented detailing the effects of interface chemistry (adhesion promoters), environmental moisture, and test temperature on the resistance of the interfaces to subcritical debonding. Strategies for increasing resistance of dielectric interfaces to fatigue debonding are outlined.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 612: Symposium D – Materials, Technology & Reliability for Advanced Interconnects.. , 2000 , D1.3.1
Copyright
Copyright © Materials Research Society 2000

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