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Effects of Fluorine Implantation into Hydrogenated Amorphous Silicon

Published online by Cambridge University Press:  28 February 2011

S. P. Wong ,
Shaoqi Peng ,
Ning Ke  and
Jingxi Liu
S. P. Wong
Affiliation:
Department of Electronic Engineering, The Chinese University of Hong Kong, Hong Kong.
Shaoqi Peng
Affiliation:
Department of Physics, Zhongshan University, Guangzhou, China.
Ning Ke
Affiliation:
Department of Physics, Zhongshan University, Guangzhou, China.
Jingxi Liu
Affiliation:
Department of Physics, Zhongshan University, Guangzhou, China.
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Abstract

Multiple-energy implantation of fluorine into rf glow discharge deposited hydrogenated amorphous silicon (a-Si:H) thin films has been performed. It is found that the optical gap decreases with the implanted fluorine concentration CF from 1.56 eV for the unimplanted sample to 1.40 eV for the sample with CF of 3×1021 cm−3. Results of the Staebler-Wronski experiment show that the ratio between the electrical conductivity before and after illumination, as well as the ratio between the photo- and dark conductivity, decrease also with Cp. Electrical measurements show that there is significant decrease in the conductivity activation energy Ea with CF for samples annealed at or below the substrate temperature TS during deposition. But for samples annealed at temperatures higher than TS, Ea was found to change back to values close to that of the unimplanted sample. A large shift to higher energy for one peak in the photoluminescence spectra at 77K has been observed, from 1.34 eV of the unimplanted sample to around 1.6 eV for the implanted samples, though with almost one order of magnitude weakening in intensity. It is also observed that ESR splitting has been induced in the fluorine implanted samples. The g-factors of the two resonances are determined to be 2.003 and 2.006, respectively. For the g=2.006 resonance, the spin density increases markedly after implantation but is essentially independent on CF before annealing and effectively reduced or eliminated after annealing. For the g=2.003 resonance, the spin density increases rapidly with CFp especially in the range from CF = 1×1020 to 1×1021 cm−3 before annealing and reduces only slightly after annealing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 235: Symposium A – Phase Formation and Modification by Beam-Solid Interactions , 1991 , 83
Copyright
Copyright © Materials Research Society 1992

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References

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