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Elastic and Inelastic Properties of Electroplated Nickel Used in LIGA Techniques

Published online by Cambridge University Press:  17 March 2011

Basrour Skandar  and
Delobelle Patrick
Basrour Skandar
Affiliation:
Laboratoire de Physique et Métrologie des Oscillateurs. UPR 3203 CNRS, 32 Avenue de l'Observatoire. 25 044 F Besançon, FRANCE
Delobelle Patrick
Affiliation:
Laboratoire de Mécanique Appliquée Raymond Chaléat. UMR 6604 CNRS, 24 rue de l'Epitaphe, 25000 Besançon, FRANCE
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Abstract

The aim of this paper is a wide investigation at the micro scale of the elastic and inelastic properties of electroplated Nickel, which is extensively used in the LIGA techniques. Using a nano-indentation set-up, we have obtained the Berkovitch's hardness HB and the Young's modulus E. These mechanical properties are affected by the current densities used during the electroplating as well as the nature of the substrates. The roughness Ra was obtained thanks to confocal microscopy and a linear behavior of HB versus 1/ Ra corresponds to a Hall and Petch relation. The yield stress Y0 and the ultimate strength Q have been deduced from the experimental measurements using a Finite Element Method (FEM).Q has been found sensitive to the deposition conditions. Moreover (Y0+Q) has shown a linear dependence versus the hardness HB. Finally, Nickel microbeams fabricated by LIGA technique have been characterized with a bending test. The data deduced from this method, i.e. E and Y0+Q, are in good agreement with the results obtained by nano-indentation.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 657: Symposia EE – Materials Science of Microelectromechanical Systems (MEMS) Devices III , 2000 , EE4.1
Copyright
Copyright © Materials Research Society 2001

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References

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