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Elastic Deformations during Phase Transition in Freestanding BaTiO3 Thin Films.

Published online by Cambridge University Press:  01 February 2011

Jaya P. Nair ,
Natalie Stavitski ,
Ilya Zon ,
Konstantin Gartsman  and
Igor Lubomirsky
Jaya P. Nair
Affiliation:
Department of Materials and Interfaces, Weizmann Institute of Science Rehovot, 76100, Israel
Natalie Stavitski
Affiliation:
Department of Materials and Interfaces, Weizmann Institute of Science Rehovot, 76100, Israel
Ilya Zon
Affiliation:
Department of Materials and Interfaces, Weizmann Institute of Science Rehovot, 76100, Israel
Konstantin Gartsman
Affiliation:
Department of Materials and Interfaces, Weizmann Institute of Science Rehovot, 76100, Israel
Igor Lubomirsky
Affiliation:
Department of Materials and Interfaces, Weizmann Institute of Science Rehovot, 76100, Israel
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Abstract

Elastic deformations during phase transition in freestanding BaTiO3 thin films were investigated. BaTiO3 films were prepared by sol-gel technique or RF magnetron sputtering on silicon substrates, covered by randomly oriented 120 nm thick Al2O3. The as-deposited films were under tensile stress of 100-170 MPa and did not show neither pyroelectric nor piezoelectric properties. Partial substrate removal caused the freestanding films to expand laterally by 0.3-0.5% and corrugate. Dielectric constant of the freestanding films (620±10) was found to be significantly higher than that of the substrate supported films (110±20). The freestanding films showed detectable piezoelectric effect, which indicated that the lateral expansion was originated from the substrate-suppressed cubic-tetragonal phase transition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 718: Symposium D – Perovskite Materials , 2002 , D12.5
Copyright
Copyright © Materials Research Society 2002

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