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Electrophotographic Patterning of a-Si:H

Published online by Cambridge University Press:  15 February 2011

H. Gleskova ,
S. Wagner  and
D. S. Shen
H. Gleskova
Affiliation:
Princeton University, Department of Electrical Engineering, Princeton, NJ 08544
S. Wagner
Affiliation:
Princeton University, Department of Electrical Engineering, Princeton, NJ 08544
D. S. Shen
Affiliation:
University of Alabama in Huntsville, Department of Electrical and Computer Engineering, Huntsville, AL 35899
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Abstract

A novel laser-printing method for the manufacturing of the backplane circuits of active-matrix liquid-crystal displays (AMLCD) is proposed and demonstrated. Xerographic toner is used as an etch mask for amorphous silicon (a-Si:H) and for the seeding of metal lines. We also demonstrate for the first time the direct-print patterning of silicon on ∼ 50 μm thick glass foil.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 377: Symposium A – Amorphous Silicon Technology 1995 , 1995 , 719
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

1. O'Mara, W., “AMLCD Manufacturing” in Seminar Lecture Notes. Vol. I, (Society for Information Display Seminars, San Jose, California, June 13–17, 1994), pp. M–3/1–40.Google Scholar
2. Morozumi, S., “Issues in Manufacturing Active-Matrix LCDs”, in Seminar Lecture Notes. Vol. II, (Society for Information Display Seminars, Boston, Massachusetts, May 18–22, 1992), pp. F–3/1–50.Google Scholar
3. US patents No. 5,188,918 (23 February 1993), and No. 5,232,810 (3 August 1993).Google Scholar
4. Available from Dyna Art Design, Lancaster, CA 93536 or from Techniks, Ringoes, NJ 08551.Google Scholar