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Erbium Doped Silicon for Light Emitting Devices

Published online by Cambridge University Press:  10 February 2011

J. Michel
Affiliation:
Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, Cambridge, MA 02139, jurgen@jurgen.mit.edu
B. Zheng
Affiliation:
Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, Cambridge, MA 02139, jurgen@jurgen.mit.edu
J. Palm
Affiliation:
Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, Cambridge, MA 02139, jurgen@jurgen.mit.edu
E. Ouellette
Affiliation:
Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, Cambridge, MA 02139, jurgen@jurgen.mit.edu
F. Gan
Affiliation:
Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, Cambridge, MA 02139, jurgen@jurgen.mit.edu
L. C. Kimerling
Affiliation:
Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, Cambridge, MA 02139, jurgen@jurgen.mit.edu
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Abstract

We report on the excitation and de-excitation processes of erbium implanted in silicon and the integration of Si:Er light emitting devices (LED) with standard CMOS technology. We find two deexcitation processes, an Auger process below 100 K and a phonon mediated energy backtransfer above 100 K. We present the first optical voice link with a silicon LED as the emitter. Optical transmission system performance with our LED is possible below 200 K.

Type
Research Article
Copyright
Copyright © Materials Research Society 1996

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References

[1] Ennen, H., Pomrenke, G., Axmann, A., Eisele, K., Haydl, W., and Schneider, J., Appl. Phys. Lett. 46, 381 (1985).Google Scholar
[2] Michel, J., Benton, J.L., Ferrante, R.F., Jacobson, D.C., Eaglesham, D.J., Fitzgerald, E.A., Xie, Y.-H., Poate, J.M., and Kimerling, L.C., J. Appl. Phys. 70, 2672 (1991)Google Scholar
[3] Favennec, P.N., L'Haridon, H., Moutennet, D., Salvi, M., and Gauneau, M., Jpn. J. Appl. Phys. 29, L524 (1990)Google Scholar
[4] Zheng, B., Michel, J., Ren, F.Y.G., Kimerling, L.C., Jacobson, D.C. and Poate, J.M., Appl. Phys. Lett. 64, 2842 (1994)Google Scholar
[5] Franzb, G., Priolo, F., Coffa, S., Polman, A., and Camera, A., Appl. Phys. Lett. 64, 2235 (1994)Google Scholar
[6] Yassievich, I.N. and Kimerling, L.C., Semicond. Sci. Technol. 7, 1 (1993)Google Scholar
[7] Morse, M., Zheng, B., Palm, J., Duan, X., and Kimerling, L.C., this volumeGoogle Scholar
[8] Palm, J., Gan, F., Zheng, B., Michel, J., and Kimerling, L.C., Phys. Rev. B, in pressGoogle Scholar
[9] Palm, J., to be publishedGoogle Scholar
[10] Libertino, S., Coffa, S., Franzò, G., and Priolo, F., J. Appl. Phys. 78, 3867 (1995)Google Scholar
[11] Taguchi, A., Takahei, K., and Nakata, J., Mat. Res. Soc, Symp. Proc. Vol.301, 139 (1993)Google Scholar