Hostname: page-component-586b7cd67f-g8jcs Total loading time: 0 Render date: 2024-11-25T19:53:32.548Z Has data issue: false hasContentIssue false
  • English
  • Français

Evaluation of Compositional Change in Masklessly Deposited Lines by Micro-Rbs Analysis

Published online by Cambridge University Press:  25 February 2011

A. Kinomura ,
M. Takai ,
Y. F. Lu ,
S. Namba ,
M. Satou  and
A. Chayahara
A. Kinomura
Affiliation:
Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, Osaka 560, Japan
M. Takai
Affiliation:
Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, Osaka 560, Japan
Y. F. Lu
Affiliation:
Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, Osaka 560, Japan
S. Namba
Affiliation:
Faculty of Engineering Science and Research Center for Extreme Materials, Osaka University, Toyonaka, Osaka 560, Japan
M. Satou
Affiliation:
Government Industrial Research Institute Osaka, Ikeda, Osaka 563, Japan
A. Chayahara
Affiliation:
Government Industrial Research Institute Osaka, Ikeda, Osaka 563, Japan
Get access

Abstract

Compositional deviation from the standard stoichiometry of tin-oxide and silicon-oxide lines masklessly deposited by laser-induced thermochemical reaction was investigated by micro Rutherford backscattering (RBS). Micro-RBS spectra of the lines deposited with various laser powers indicated that the stoichiometry of the deposited lines for both tin-oxide and silicon-oxide was improved by the increase in laser power. A tomographic image of the tin-oxide line showed a compositional inhomogeneity across the line.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 157: Symposium A – Beam-Solid Interactions: Physical Phenomena , 1989 , 311
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Ehrlich, D. J. and Tsao, J. Y., J. Vac. Sei. Tech. B1, 969 (1983).Google Scholar
2 see for example: Principles and Application of High Energy Ion Microbeams, ed. Watt, F. and Grime, G. W. (Adam Hilger, Bristol, 1987).Google Scholar
3 Doyle, B. L., Nucl. Instr. & Meth. B15, 654 (1986).Google Scholar
4 Kinomura, A., Takai, M., Matsuo, T., Satou, M., Chayahara, A. and Namba, S., Jpn. J. Appl. Phys. 28, L1286 (1989).Google Scholar
5 Takai, M., Kinomura, A., Inoue, K., Matsunaga, K., Izumi, M., Gamo, K. and Namba, S., Nucl. Instr. & Meth. B30, 260 (1988).Google Scholar
6 Tokuda, J., Takai, M., Gamo, K. and Namba, S., Mater. Res. Soc. Proc. 101, 261 (1988).Google Scholar
7 Lu, Y. F., Takai, M., Kinomura, A., Sanda, H. and Namba, S., submitted to Lasers in Materials Engineering.Google Scholar
8 Hobbs, C. P., McMillan, J. W. and Palmer, D. W., Nucl. Instr. & Meth. B30, 342 (1989).Google Scholar