Hostname: page-component-586b7cd67f-t8hqh Total loading time: 0 Render date: 2024-11-23T20:27:02.908Z Has data issue: false hasContentIssue false
  • English
  • Français

Fabrication of Highly Oriented, Smooth Diamond Films on Silicon for Electronic Devices

Published online by Cambridge University Press:  15 February 2011

S. D. Wolter ,
T. H. Borst ,
P. Gluche ,
W. Ebert ,
A. Vescan  and
E. Kohn
S. D. Wolter
Affiliation:
Department of Electron Devices and Circuits, University of Ulm, Ulm/Donau, Germany, D-89069
T. H. Borst
Affiliation:
Department of Electron Devices and Circuits, University of Ulm, Ulm/Donau, Germany, D-89069
P. Gluche
Affiliation:
Department of Electron Devices and Circuits, University of Ulm, Ulm/Donau, Germany, D-89069
W. Ebert
Affiliation:
Department of Electron Devices and Circuits, University of Ulm, Ulm/Donau, Germany, D-89069
A. Vescan
Affiliation:
Department of Electron Devices and Circuits, University of Ulm, Ulm/Donau, Germany, D-89069
E. Kohn
Affiliation:
Department of Electron Devices and Circuits, University of Ulm, Ulm/Donau, Germany, D-89069
Get access

Abstract

A new bias-enhanced nucleation method based on an AC-bias step to form highly oriented diamond (HOD) nuclei on silicon substrates is presented. The uniformity of the nucleated film and the bias time strongly depended on the substrate temperature and the substrate holder. In our case the shortest bias time and highest nucleation densities were achieved at ∼ 850°C while using a graphite susceptor. Following this nucleation enhancement step the diamond films were grown out using conditions employing an α-parameter slightly greater than 2. This ultimately leads to extremely smooth and well-faceted (100) textured HOD films which could be used as substrates for the fabrication of electronic devices.

Schottky diodes with high rectification ratios and high breakdown voltages have been fabricated for the first time via selective growth of the active boron doped diamond layers on these HOD films. Results of the growth procedure and diode performance will be given.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 423: Symposium E – III-Nitride, SiC, and Diamond Materials for Electronic , 1996 , 63
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Stoner, B. R. and Glass, J. T., Appl. Phys. Lett. 60, 698 (1992).Google Scholar
2. Jiang, X., Klages, C.-P., Zachai, R., Hartweg, M., and Füsser, H. -J., Appl. Phys. Lett. 62, 3438 (1993).Google Scholar
3. Wolter, S. D., Stoner, B. R., Glass, J. T., Ellis, P. J., Buhaenko, D. S., Jenkins, C. E., and Southworth, P., Appl. Phys. Lett. 62, 1215 (1993).Google Scholar
4. Stoner, B. R., Kao, Chien-teh, Malta, D. M., Glass, R. C., Appl. Phys. Lett. 62, 2347 (1993).Google Scholar
5. Fox, B. A., Stoner, B. R., Malta, D. M., Ellis, P. J., Glass, R. C., and Sivazlian, F. R., Diamond and Related Materials 3, 382 (1994).Google Scholar
6. Stoner, B. R., Williams, B. E., Wolter, S. D., Nishimura, K., and Glass, J. T., J. Mater. Res., 7 (1992) 1.Google Scholar
7. Wolter, S. D., Borst, T. H., Vescan, A., and Kohn, E., submitted for publication in Appl. Phys. Lett., April, 1996.Google Scholar
8. Gluche, P., Wolter, S. D., Borst, T. H., Ebert, W., Vescan, A., and Kohn, E., accepted for publication in Electronic Device Letters, June, 1996.Google Scholar
9. Stoner, B. R., Ma, G. H., Wolter, S. D., Zhu, W., Yang, Y.-C., Davis, R. F., and Glass, J. T., Dia. Rel. Mat. 2, 142 (1993).Google Scholar
10. Yugo, S., Kanai, T., Kimura, T., and Muto, T., Appl. Phys. Lett. 58, 1036 (1991).Google Scholar
11. Yugo, S., Kanai, T., and Kimura, T., Dia. Rel. Mat. 1, 388 (1992).Google Scholar
12. Yugo, S., Kimura, T., and Kanai, T., Dia. Rel. Mat. 2, 328 (1992).Google Scholar
13. Jiang, X., Six, R., Klages, C.-P., Zachai, R., Hartweg, M., and Füßer, H.-J., Dia. Rel. Mat. 2, 407 (1992).Google Scholar
14. Wolter, S. D., Glass, J. T., and Stoner, B. R., Thin Solid Films 261, 4 (1995).Google Scholar
15. Stoner, B. R., Ma, G. H-. M., Wolter, S. D., and Glass, J. T., Phys. Rev. B 45, 11067 (1991).Google Scholar
16. Gerber, J., Sattel, S., Jung, K., Erhardt, H., and Robertson, J., Dia. Rel. Mat. 4, 559 (1995).Google Scholar
17. Robertson, J., Dia. Rel. Mat. 4, 549(1995).Google Scholar
18. Beckmann, R., Sobisch, B., Kulisch, W., and Rau, C., Dia. Rel. Mat. 3, 555(1994).Google Scholar
19. Spitzl, R., Raiko, V., Heiderhoff, R., Gnaser, H., and Engemann, J., Dia. Rel. Mat. 4, 563(1995).Google Scholar