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Fabrication of Mems Devices by Powder-Filling into DXRL-Formed Molds

Published online by Cambridge University Press:  10 February 2011

Terry J. Garino ,
Todd Christenson  and
Eugene Venturini
Terry J. Garino
Affiliation:
Sandia National Laboratories, MS-141 1, Albuquerque, NM 87185-1411
Todd Christenson
Affiliation:
Sandia National Laboratories, MS-141 1, Albuquerque, NM 87185-1411
Eugene Venturini
Affiliation:
Sandia National Laboratories, MS-141 1, Albuquerque, NM 87185-1411
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Abstract

We have developed a variety of processes for fabricating components for micro devices based on deep x-ray lithography (DXRL). Although the techniques are applicable to many materials, we have demonstrated them using hard (Nd 2Fe14B) and soft (Ni-Zn ferrite) magnetic materials because of the importance of these materials in magnetic micro-actuators and other devices and because of the difficulty fabricating them by other means. The simplest technique involves pressing a mixture of magnetic powder and a binder into a DXRL-formed mold. In the second technique, powder is pressed into the mold and then sintered to densify. The other two processes involve pressing at high temperature either powder or a dense bulk material into a ceramic mold that was previously made using a DXRL mold. These techniques allow arbitrary 2-dimensional shapes to be made 10 to 1000 μm thick with in-plane dimensions as small as 50μm and dimensional tolerances in the micron range. Bonded isotropic Nd2Fe14B micro-magnets made by these processes had an energy product of 7 MGOe.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 546: Symposium AA – Materials Science of Microelectromechanical Systems (MEMS)… , 1998 , 195
Copyright
Copyright © Materials Research Society 1999

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References

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