Hostname: page-component-cd9895bd7-gbm5v Total loading time: 0 Render date: 2024-12-27T18:27:04.241Z Has data issue: false hasContentIssue false

Fabrication of Multilayer Metal-Dielectric Nanofilms for Coupled Plasmon Resonant Devices

Published online by Cambridge University Press:  01 February 2011

M. Joseph Roberts
Affiliation:
joe.roberts@navy.mil, NAVAIR NAWCWD, Polymer Science and Engineering, Code 498220D, 1900 N. Knox Road STOP 6303, China Lake, CA, 93555-6106, United States
Andrew Guenthner
Affiliation:
joe.roberts@navy.mil, NAVAIR NAWCWD, China Lake, 93555, United States
Geoff Lindsay
Affiliation:
joe.roberts@navy.mil, NAVAIR NAWCWD, China Lake, 93555, United States
Simin Feng
Affiliation:
simin.feng@navy.mil, NAVAIR NAWCWD, China Lake, 93555, United States
Get access

Abstract

We have developed a process for production of laterally continuous silver layers alternated with glassy polymer films in which the thickness is on the order of 15 nm and 100 nm respectively. Such films can be used to study physical phenomena associated with the coupled plasmon resonance and the resonant transmission in the forbidden bands. Such films may also find applications in photonic bandgap and other nanoplasmonic devices. Since the surface plasmon and evanescent coupling is a means to propagate light inside nanocircuits, the investigation of the coupled surface plasmon in the multilayer structures provides us with fundamental knowledge for the 3D integration. The fabrication technique also allows design flexibility, for example, systems with regions of single M-D-M plane together with multilayer structures facilitating tunable multiple plasmon resonance wavelength response from a single system. Multiple plasmon wavelength resonance absorptions may be obtained from such systems. Utilizing polymer films as the dielectric enables design flexibility and increases the number of applications of the fabricated devices.

Type
Research Article
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Feng, S., Elson, J. M., and Overfelt, P. L., Optics Express, 13, 4113 (2005)Google Scholar
2. Laroche, M.,. Carminati, R., and Greffet, J.-J., Phys. Rev. B 71, 155113 (2005)Google Scholar
3. Feng, S. and Elson, J. M., Optics Express, 14, 216 (2006)Google Scholar
4. Fang, N., Lee, H., Sun, C., Zhang, X., Science 308, 534537 (2005)Google Scholar
5. Melville, D. O. S., Blaikie, R. J., J. Opt. Soc. Am. B 23(3), 461467 (2006)Google Scholar
6. Kwon, S., Kim, P., Chang, W., Jeong, S., “Fabrication of Nano Dot and Line Arrays using NSOM Lithography,” Proceedings of 2nd International Symposium on Nanomanufacturing, pp.252255, November 3-5 2004 Daejon Korea Google Scholar
7. Madou, M., Fundamentals of Microfabrication, (CRC Press, Boca Raton, 1997), p99 Google Scholar