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Ferroelectric Thin Films for Microactuator Applications

Published online by Cambridge University Press:  25 February 2011

Jiayu Chen ,
K. R. Udayakumar ,
Keith G. Brooks  and
L. Eric. Cross
Jiayu Chen
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
K. R. Udayakumar
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
Keith G. Brooks
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
L. Eric. Cross
Affiliation:
Materials Research Laboratory, The Pennsylvania State University, University Park, PA 16802
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Abstract

Ferroelectric thin films of PZT and PMN-PT were fabricated by the solgel spin-on technique. The films show high dielectric constants, polarization and breakdown strength values. Using a laser interferometer (ultradilatometer), the piezoelectric and electrostrictive coefficients of the films were measured. The results indicate that the sol-gel derived ferroelectric thin films have good electromechanical properties and can be used in rnicroactuator applications.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 243: Symposium G – Ferroelectric Thin Films II , 1991 , 361
Copyright
Copyright © Materials Research Society 1992

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References

[l] Zhang, Q.M., Jang, S.J. and Cross, L.E., J.Appl. Phys., 65 (7), (1989)Google Scholar
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[3] Udayakumar, K.R. et al. , Proceedings of the 4th LEEE MEMS workshop, N ara, J apant, 109(1991)Google Scholar
[4] Udayakumar, K.R., Chen, J., Krupanidhi, S.B., and Cross, L.E., Proceedings of the 7th int. Symp. on Applications of Ferroelectrics, Champaign, IL, (1990)Google Scholar
[5] Hagimura, A. and Uchino, K., Ferroelectrics 93, (1989)Google Scholar
[6] Chen, J., Udayakumar, K.R., Brooks, K.G., and Cross, L.E., J. AppI. Phys. (accepted)Google Scholar