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Finite Element Analysis of a MOCVD Reactor Having a Close-Spaced Injector

Published online by Cambridge University Press:  10 February 2011

Yang Ren Sun ,
David W. Weyburne  and
Qing S. Paduano
Yang Ren Sun
Affiliation:
SunTech Associates, 209 Great Road, Acton MA 01720
David W. Weyburne
Affiliation:
US Air Force Research Laboratory/SNHX, 80 Scott Drive, Hanscom AFB, MA 01731
Qing S. Paduano
Affiliation:
Tufts University, Medford, MA 02155
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Abstract

A 2-D axisymmetric finite element analysis has been performed on a vertical MOCVD reactor having a close-spaced water-cooled injector for which the gas is injected only 1.6 cm above the rotating disk. The analysis showed that the system has a much higher flow stability, in terms of suppression of unwanted thermally driven convection, than conventional reactors. In addition, the flow study has identified two kinds of flow recirculation, a purely thermally driven convection and a geometry assisted one. The former is initiated with gas flowing upward near the center of the disk circulating clockwise, the latter one is located near the chamber wall circulating counterclockwise. This result is important in interpreting experiments.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 490: Symposium Q – Semiconductor Process & Device Performance Modeling , 1997 , 193
Copyright
Copyright © Materials Research Society 1998

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