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High Resolution X-Ray Reciprocal Space Mapping of Wavy Layers

Published online by Cambridge University Press:  10 February 2011

P. Kidd  and
P. F. Fewster
P. Kidd
Affiliation:
Department of Physics, Queen Mary and Westfield College, University of London, London, El, 4NS, UK, p.kidd@qmw.ac.uk
P. F. Fewster
Affiliation:
Philips Research Laboratories, Cross Oak Lane, Redhill, RH1 5HA, UK, fewster@prl.research.philips.com
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Abstract

We apply the technique of High Resolution X-ray Reciprocal Space Mapping (HRRSM) to the study of wavy layers in InGaAs multilayer thin films on InP substrates. By accurately measuring the positions of the layer Bragg peaks in reciprocal space we obtain measurements of the compositions and residual coherency strains in the layers. We discuss the contributions to the diffuse scatter around the Bragg peaks from factors such as lattice tilts and interface roughness. By modelling the shapes of the diffraction profiles we obtain measurements of mosaic block size both perpendicular and parallel to the multilayer/substrate interface. We conclude that the wavy interface morphology arises predominantly from layer thickness variations rather than lattice tilts.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 472: Symposium I – Polycrystalline Thin Films - Structure, Texture, Properties..III , 1997 , 257
Copyright
Copyright © Materials Research Society 1997

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References

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