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Interfacial Failure In Ti/Sio2 and Ti/AIN System And Temperature Dependence Of Hardness Of AIN

Published online by Cambridge University Press:  21 February 2011

T. Liu ,
R. Notis  and
Y. T. Chou
T. Liu
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, Pa 18015
R. Notis
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, Pa 18015
Y. T. Chou
Affiliation:
Department of Materials Science and Engineering, Lehigh University, Bethlehem, Pa 18015
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Abstract

The load dependence of interracial failure induced by microindentation has been studied. It is demonstrated experimentally that substrate lateral defects induced by indentation contribute significantly to interracial failure. The microhardness of translucent AIN was measured at temperatures up to 1200°C. The hardness decreased from 10.6GPa at room temperature to 4.0GPa at 1200°C.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 167: Symposium K – Advanced Electronic Packaging Materials , 1989 , 301
Copyright
Copyright © Materials Research Society 1990

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References

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