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Ion Beam Sputtering and Properties of Superconducting YBaCuO thin Films

Published online by Cambridge University Press:  28 February 2011

D. Pavona ,
H. Baer ,
H. Berger ,
V. GasParov ,
M. Schmidt ,
F. Vasey  and
F-K. Reinhart
D. Pavona
Affiliation:
Institute of Applied Physics, Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland
H. Baer
Affiliation:
Institute of Applied Physics, Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland
H. Berger
Affiliation:
Institute of Applied Physics, Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland
V. GasParov
Affiliation:
Institute of Experimental Physics, The University of Lausanne, Lausanne, Switzerland
M. Schmidt
Affiliation:
Institute of Experimental Physics, The University of Lausanne, Lausanne, Switzerland
F. Vasey
Affiliation:
Institute of Applied Physics, Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland
F-K. Reinhart
Affiliation:
Institute of Applied Physics, Swiss Federal Institute of Technology, CH-1015 Lausanne, Switzerland
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Abstract

We describe single-target ion beam sputtering of superconducting YBaCuO thin films mainly onto R-sapphire and (100) SrTiO3 substrates. We discuss different thermal treatments and consequent X-ray and resistivity results and conclude with X-ray photoelectron spectroscopy data which indicate formation of hydroxydes on the surface of films exposed to atmosphere.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 99: Symposium AA – High-Temperature Superconductors , 1987 , 681
Copyright
Copyright © Materials Research Society 1988

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References

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