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Published online by Cambridge University Press: 01 February 2011
Nanoscale apertures that provide a fluidic path between two reservoirs can be used for numerous applications. These applications include patch-clamp type measurements, Coulter counting and molecular studies. For Coulter counting of nanometer-sized analytes, we have developed a process capable of reproducibly fabricating cylindrical apertures in a silicon-on-insulator substrate with diameters less than 30 nm. The fabrication process utilizes electron beam lithography for the lithographic definition of the apertures enabling accurate control of final device dimensions. Measurements of the conductance of the pores as a function of KCl concentration reveal the presence of a surface conduction mechanism that dominates the conductance of the nanopore and leads to a deviation of the concentration dependence of the conductance from the case of bulk solution. From current traces recorded, the passage of individual particles through the pore can be concluded.