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Laser and Thermal Annealing Modification of Diamond-Like Atomic-Scale Composite Films Studied by Micro Raman Spectroscopy

Published online by Cambridge University Press:  10 February 2011

J. Z. Wan ,
Fred H. Pollak  and
Benjamin F. Dorfman
J. Z. Wan
Affiliation:
Physics Department and New York State Center for Advanced Technology in Ultrafast Photonic Materials and Applications, Brooklyn College of CUNY, Brooklyn, NY 11210, FHPBC@CUNYVM.CUNY.EDU
Fred H. Pollak
Affiliation:
Physics Department and New York State Center for Advanced Technology in Ultrafast Photonic Materials and Applications, Brooklyn College of CUNY, Brooklyn, NY 11210, FHPBC@CUNYVM.CUNY.EDU
Benjamin F. Dorfman
Affiliation:
Atomic Scale Design, Inc., SUNY-Farmingdale, Farmingdale, NY 11735
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Abstract

We have modified the properties of diamond-like atomic-scale composite (DLASC) material of various thicknesses (5 μm – 70 μm) by means of (a) cw Ar-ion laser annealing using a focussed beam (˜ 2 μm spot size) and (b) thermal annealing (400°C≤ T ≤800°C for one hour). These DLASC films [amorphous “diamond-like/quartz-like” a-(C:H/Si:O)] constitute a novel class of diamond-related materials. The annealing effects were investigated by micro-Raman scattering. The laser annealing procedure shows that the structure of these films can be altered locally from amorphous to nano-crystallite depending not only on the parameters of the annealing process (annealing time, laser intensity) but also the mechanical properties (hardness and stress) of the DLASC films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 441: Thin Films – Structure and Morphology , 1996 , 647
Copyright
Copyright © Materials Research Society 1997

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