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Laser and Thermal Annealing Modification of Diamond-Like Atomic-Scale Composite Films Studied by Micro Raman Spectroscopy

Published online by Cambridge University Press:  10 February 2011

J. Z. Wan ,
Fred H. Pollak  and
Benjamin F. Dorfman
J. Z. Wan
Affiliation:
Physics Department and New York State Center for Advanced Technology in Ultrafast Photonic Materials and Applications, Brooklyn College of CUNY, Brooklyn, NY 11210, FHPBC@CUNYVM.CUNY.EDU
Fred H. Pollak
Affiliation:
Physics Department and New York State Center for Advanced Technology in Ultrafast Photonic Materials and Applications, Brooklyn College of CUNY, Brooklyn, NY 11210, FHPBC@CUNYVM.CUNY.EDU
Benjamin F. Dorfman
Affiliation:
Atomic Scale Design, Inc., SUNY-Farmingdale, Farmingdale, NY 11735
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Abstract

We have modified the properties of diamond-like atomic-scale composite (DLASC) material of various thicknesses (5 μm – 70 μm) by means of (a) cw Ar-ion laser annealing using a focussed beam (˜ 2 μm spot size) and (b) thermal annealing (400°C≤ T ≤800°C for one hour). These DLASC films [amorphous “diamond-like/quartz-like” a-(C:H/Si:O)] constitute a novel class of diamond-related materials. The annealing effects were investigated by micro-Raman scattering. The laser annealing procedure shows that the structure of these films can be altered locally from amorphous to nano-crystallite depending not only on the parameters of the annealing process (annealing time, laser intensity) but also the mechanical properties (hardness and stress) of the DLASC films.

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Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 441: Thin Films – Structure and Morphology , 1996 , 647
Copyright
Copyright © Materials Research Society 1997

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