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Laser-Stimulated Noble Metal Deposition From Gaseous and Condensed Acetylacetonates. Photoreactions in the Supersonic Jet and Above Silicon

Published online by Cambridge University Press:  26 February 2011

Joachim Heidberg ,
Rahman Daghighi-Ruhi ,
Hanns Von Weyssenhoff  and
Achim Habekost
Joachim Heidberg
Affiliation:
Institut für Physikalische Chemie und Elektrochemie, Universität Hannover, Callinstr. 3-3A, D-3000 Hannover 1, F.R. Germany
Rahman Daghighi-Ruhi
Affiliation:
Institut für Physikalische Chemie und Elektrochemie, Universität Hannover, Callinstr. 3-3A, D-3000 Hannover 1, F.R. Germany
Hanns Von Weyssenhoff
Affiliation:
Institut für Physikalische Chemie und Elektrochemie, Universität Hannover, Callinstr. 3-3A, D-3000 Hannover 1, F.R. Germany
Achim Habekost
Affiliation:
Institut für Physikalische Chemie und Elektrochemie, Universität Hannover, Callinstr. 3-3A, D-3000 Hannover 1, F.R. Germany
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Abstract

Laser-stimulated deposition from the acetylacetonates of Pt and Ir has been found to take place on silicon surfaces. The gas phase photoreactions have been observed in a supersonic free jet TOF mass spectrometer and above silicon. The bare metal ions and metal cluster ions are formed from the complexes in the gas by multiphoton excitation. On the substrates deposits are detected by microprobe analysis with a metal content higher than 95 %. Also from condensed complexes laser-induced metal deposition, and as competitive process photodesorption, takes place.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 101: Symposium B – Laser and Particle-Beam Chemical Processing for Microelectronics , 1987 , 221
Copyright
Copyright © Materials Research Society 1998

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References

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