Article contents
Long-Term Stability of Nickel in Resonant Micro-Mechanical Devices
Published online by Cambridge University Press: 15 February 2011
Abstract
A nickel micromechanical device was resonated and the natural frequency of the structure was monitored over time. Any structural rearrangement or damage initiation in the material was expected to cause a corresponding change in the resonant frequency of the device. The resonant frequency of the device was initially about 31.8 kHz and the frequency was found to decline over time at a rate of 0.17 Hz/s.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1993
References
REFERENCES
- 3
- Cited by