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Method and Instrumentation for Nondestructive Characterization of Surface Area and Pore Size Distribution of Thin Films in Their Deposited State

Published online by Cambridge University Press:  10 February 2011

E. S. Boltz ,
Y. H. Spooner ,
S. G. Albanna ,
D. J. Taylor ,
A. R. Stallings  and
J. P. Abeyta
E. S. Boltz
Affiliation:
Marathon Sensors Inc., 3100 E. Kemper Rd., Cincinnati, OH 45241
Y. H. Spooner
Affiliation:
Superior MicroPowders, Albuquerque, NM
S. G. Albanna
Affiliation:
TPL, Inc, 3921 Academy Pkwy. North, NE, Albuquerque, NM 87120
D. J. Taylor
Affiliation:
TPL, Inc, 3921 Academy Pkwy. North, NE, Albuquerque, NM 87120
A. R. Stallings
Affiliation:
TPL, Inc, 3921 Academy Pkwy. North, NE, Albuquerque, NM 87120
J. P. Abeyta
Affiliation:
TPL, Inc, 3921 Academy Pkwy. North, NE, Albuquerque, NM 87120
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Abstract

TPL has developed a method and instrumentation system for characterizing the surface area and pore size distribution of a thin-film or coating in its as-deposited state. Errors associated with destructive removal of the film are avoided and small sample sizes can be utilized with high-fidelity results.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 591 , 1999 , 231
Copyright
Copyright © Materials Research Society 2000

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References

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