Hostname: page-component-586b7cd67f-vdxz6 Total loading time: 0 Render date: 2024-12-01T03:50:52.955Z Has data issue: false hasContentIssue false
  • English
  • Français

Microinstrument for the Characterization of Submicron Silicon Fibers at High Strain

Published online by Cambridge University Press:  10 February 2011

J. M. Chen ,
B. W. Reed ,
J. M. Chen ,
B. W. Reed  and
N. C. MacDonald
J. M. Chen
Affiliation:
Applied Physics Department, Cornell University, Ithaca, NY 14853
B. W. Reed
Affiliation:
Applied Physics Department, Cornell University, Ithaca, NY 14853
J. M. Chen
Affiliation:
Applied Physics Department, Cornell University, Ithaca, NY 14853
B. W. Reed
Affiliation:
Applied Physics Department, Cornell University, Ithaca, NY 14853
N. C. MacDonald
Affiliation:
EE Department, Cornell University, Ithaca, NY, 14853
Get access

Abstract

We present a MEMS microinstrument to interface submicron-scale structures and study their properties. Using this microinstrument integrated with a 150nm diameter silicon fiber that has high fracture strength and a high force micro-actuator, the non-linearity of n-type silicon's piezoresistive effect is measured up to the third order, using data from the high strain range of 0-1% for the first time.

Keywords

microinstrumentMEMSpiezoresistancesubmicron silicon
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 605: Symposium MM – Materials Science of Microelectromechanical Systems Devices II , 1999 , 13
Copyright
Copyright © Materials Research Society 2000

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Reed, B. W., Chen, J. M., MacDonald, N. C. et al. , Physical Review B 60, 5641 (1999).Google Scholar
2. Carr, D. W., Evoy, S., Sekaric, H. G. C. L. et al. , Applied Physics Letters 75, 920 (1999).10.1063/1.124554Google Scholar
3. Reed, B. W., PhD Thesis (Cornell University, Ithaca, 1999).Google Scholar
4. Chen, J. M., PhD Thesis(Cornell University, Ithaca, 2000).Google Scholar
5. Turner, K. L., Hartwell, P. G., and MacDonald, N. C., in Transducers '99, Sendai, Japan, 1999).Google Scholar
6. Saif, M. T. A. and MacDonald, N. C., Journal of Materials Research 13, 3353 (1998).Google Scholar
7. Sato, K., Yoshioka, T., Ando, T. et al. , Sensors and Actuators A 70 (1998).10.1016/S0924-4247(98)00125-3Google Scholar
8. Pearson, G. L., R., W. T. Jr., and Feldmann, W. L., Acta Metallurgica 5, 181 (1957).10.1016/0001-6160(57)90164-5Google Scholar
9.K. Matsuda, Suzuki, K., Yamamura, K. et al. , Journal of Applied Physics 73, 1838 (1993).Google Scholar
10. Wortman, J. J. and Evans, R. A., Journal of Applied Physics 36, 153 (1965).Google Scholar
11. Tufte, O. N. and Stelzer, E. L., Physical Review 133, A 1705 (1964).Google Scholar