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Microstructure and ferroelectric properties of ultrathin PbTiO3 films by MOCVD

Published online by Cambridge University Press:  26 February 2011

Hironori Fujisawa ,
Toru Horii ,
Yoshiyuki Takashima ,
Masaru Shimizu ,
Yasutoshi Kotaka  and
Koichiro Honda
Hironori Fujisawa
Affiliation:
fujisawa@eng.u-hyogo.ac.jp, University of Hyogo, Dept. of EE & CS, 2167 Shosha, Himeji, Hyogo, 671-2201, Japan, +81-792-67-4883, +81-792-67-4855
Toru Horii
Affiliation:
er05f039@steng.u-hyogo.ac.jp, University of Hyogo, Dept. of EE & CS, Japan
Yoshiyuki Takashima
Affiliation:
er05v026@steng.u-hyogo.ac.jp, University of Hyogo, Dept. of EE & CS, Japan
Masaru Shimizu
Affiliation:
mshimizu@eng.u-hyogo.ac.jp, University of Hyogo, Dept. of EE & CS, Japan
Yasutoshi Kotaka
Affiliation:
kotakay@jp.fujitsu.com, Fujitsu Laboratory Ltd., Japan
Koichiro Honda
Affiliation:
honda.koichiro@jp.fujitsu.com, Fujitsu Laboratory Ltd., Japan
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Abstract

We report on microstructure and ferroelectric properties of ultrathin PbTiO3 films epitaxially grown on SrTiO3(100), La-doped SrTiO3(100) and SrRuO3/SrTiO3(100) by MOCVD. High angle annular dark field scanning transmission electron microscopy, atomic force microscopy, x-ray diffraction and x-ray reflectivity measurements demonstrated that 1-20 monolayer (ML)-thick epitaxial PbTiO3 films had high-crystallinity, atomically flat surface and sharp interface at an atomic scale. The epitaxial relationship and thickness were also confirmed by these methods. Kelvin force probe microscopy and contact resonance piezoresponse force microscopy revealed that a 7ML (2.7nm)-thick PbTiO3 film grown on SrRuO3/SrTiO3 had the ferroelectric polarization.

Keywords

ferroelectricitychemical vapor deposition (CVD) (deposition)transmission electron microscopy (TEM)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 902: Symposium T – Ferroelectric Thin Films XIII , 2005 , 0902-T03-31
Copyright
Copyright © Materials Research Society 2006

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