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Microstructure of c-BN Films Deposited by IBAD: IR and Hrem Analyses

Published online by Cambridge University Press:  10 February 2011

S. Ilias ,
J. Pascallon ,
V. Stambouli ,
D. Bouchier  and
G. Nouet
S. Ilias
Affiliation:
Institut d'Electronique Fondamentale, URA CNRS 22, Bat 220, Université Paris-Sud, F -91405 Orsay cedex, France, Valerie.Stambouli@ief.u-psud.fr
J. Pascallon
Affiliation:
Institut d'Electronique Fondamentale, URA CNRS 22, Bat 220, Université Paris-Sud, F -91405 Orsay cedex, France, Valerie.Stambouli@ief.u-psud.fr
V. Stambouli
Affiliation:
Institut d'Electronique Fondamentale, URA CNRS 22, Bat 220, Université Paris-Sud, F -91405 Orsay cedex, France, Valerie.Stambouli@ief.u-psud.fr
D. Bouchier
Affiliation:
Institut d'Electronique Fondamentale, URA CNRS 22, Bat 220, Université Paris-Sud, F -91405 Orsay cedex, France, Valerie.Stambouli@ief.u-psud.fr
G. Nouet
Affiliation:
Laboratoire d'Etudes et de Recherches sur les Matériaux - Institut des Sciences de la Matière et du Rayonnement, Unité associée CNRS 6004, 6 Blvd du Maréchal Juin, F - 14050 Caen cedex, France, gerard@leririsl.ismra.fr
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Abstract

The in-depth distribution of phases in c-BN films deposited by Ion Beam Assisted Deposition (IBAD) at two different ion energy values (300 and 600 eV) was investigated using the quantitative IR transmission measurements and the HREM technique. Whatever the value of the studied ion energies, the characteristic layered morphology of c-BN film is observed including the interfacial sp2 zone between the substrate and the c-BN volume. In the case of 600 eV ion energy, this interfacial zone is less well-defined in comparison with 300 eV ion energy and the corresponding thickness is more important. Furthermore, the h-BN phase is more diluted within the c-BN film volume showing that the purest phase concentration of c-BN is found for the lowest ion energy, i.e. 300 eV.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 472: Symposium I – Polycrystalline Thin Films - Structure, Texture, Properties..III , 1997 , 173
Copyright
Copyright © Materials Research Society 1997

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References

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