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Molecular Dynamics Simulation of the Effects of Energetic Cluster Ion Impact on Solid Surface

Published online by Cambridge University Press:  22 February 2011

Z. Insepov ,
M. Sosnowski ,
G. H. Takaoka  and
I. Yamada
Z. Insepov
Affiliation:
Permanent address: Kazakh Polytechnic Institute, 22Satpaev Str., Almaty, Kazakhstan, SU 480013
M. Sosnowski
Affiliation:
Permanent address: Department of Electrical and Computer Engineering, New Jersey Institute of Technology, Newark, New Jersey, 07102, USA
G. H. Takaoka
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Kyoto 606, Japan
I. Yamada
Affiliation:
Ion Beam Engineering Experimental Laboratory, Kyoto University, Kyoto 606, Japan
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Abstract

Beams of energetic clusters may provide a unique tool for surface modification. Experimental data on the effects of cluster bombardment are still scarce but Molecular Dynamics Simulation may help guide the research in most promising directions. We modeled Ar cluster impact on gold surface and compared the calculated sputtering yield with the available experimental data at 30 keV. The results confirm the uniqueness of cluster impacts characterized by deposition of very high energy density at the surface.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 316: Symposium A – Materials Synthesis and Processing Using Ion Beams , 1993 , 999
Copyright
Copyright © Materials Research Society 1994

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References

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