Hostname: page-component-78c5997874-v9fdk Total loading time: 0 Render date: 2024-11-08T19:12:06.827Z Has data issue: false hasContentIssue false
  • English
  • Français

Molecular Dynamics Study Of Surface Morphological Evolution By Cluster Impacts

Published online by Cambridge University Press:  01 February 2011

Takaaki Aoki ,
Jiro Matsuo  and
Isao Yamada
Takaaki Aoki
Affiliation:
Quantum Science and Engineering Center, Kyoto University, Sakyo, Kyoto, 606–8501, JAPAN Collaborative Research Center for Cluster Ion Beam Process Technology and Advanced, Quantum Beam Process Technology
Jiro Matsuo
Affiliation:
Quantum Science and Engineering Center, Kyoto University, Sakyo, Kyoto, 606–8501, JAPAN
Isao Yamada
Affiliation:
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology CAST, 3–1–2 Kouto, Kamigori-cho, Ako-gun, Hyogo, 678–1205, JAPAN Collaborative Research Center for Cluster Ion Beam Process Technology and Advanced, Quantum Beam Process Technology
Get access

Abstract

In order to understand the characteristics of surface modification process with cluster ion irradiation, molecular dynamics simulations of Ar cluster impacting on Si surface with various surface structures were carried out. It was found that the surface morphology is dynamically deformed with only one cluster impact and the impact process of cluster is different depending on the local surface structure. For example, when an Ar2000 cluster accelerated with 20keV impacted on the convex point of the surface, the hill was compressed and the impact area was smoothed. At the impact on a concave point, a deeper crater was formed compared with the impact on a flat surface. On the other hand, the MD simulations of sequential impacts of large clusters were performed. It was found that the small tip structures on the surface could be removed easily with cluster irradiation. It was shown that surface roughness converges to 15∼20Å and this value agrees with the result obtained by single impact of cluster.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 792: Symposium R – Radiation Effects and Ion Beam Processing of Materials , 2003 , R4.7
Copyright
Copyright © Materials Research Society 2004

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Yamada, I., Matsuo, J., Insepov, Z., Aoki, T., Seki, T. and Toyoda, N., Nucl. Instr. and Meth. B, 164–165 (2000) 944.Google Scholar
2. Matsuo, J., Katsumata, H., Minami, E. and Yamada, I., Nucl. Instr. and Meth., B 161–163 (2000) 952.Google Scholar
3. Yoshida, A., Deguchi, M., Kitabatake, M., Hirao, T., Matsuo, J., Toyoda, N., Yamada, I., Nucl. Instr. and Meth. B, 112 (1996) 249.Google Scholar
4. Toyoda, N., Kitani, H., Hagiwara, N., Matsuo, J. and Yamada, I., Mater. Chem. and Phys., 54 (1998) 106.Google Scholar
5. Sun, J. J., Shimazawa, K., Kasahara, N., Sato, K., Kagami, T., Saruki, S., Araki, S. and Matsuzaki, M., J. Appl. Phys., 89 (2001), 6653.Google Scholar
6. Toyoda, N., Hagiwara, N., Matsuo, J., Yamada, I., Nucl. Instr. and Meth. B, 148 (1999), 639. Google Scholar
7. Moseler, M., Rattunde, O., Nordiek, J., Haberland, H., Nucl. Instr. and Meth. B, 164–165 (2000), 522. Google Scholar
8. Rattunde, O., Moseler, M., Häfele, A., Kraft, J., Rieser, D., Haberland, H., J. Appl. Phys., 90 (2001), 3226.Google Scholar
9. Stillinger, F. H. and Weber, T. A., Phys. Rev., B 31 (1985) p. 5632.Google Scholar
10. Ziegler, J. F., Biersack, J. P. and Littmark, U., The stopping and range of ions in solids (Pergamon Press, New York, U.S.A, 1985).Google Scholar
11. Seki, T., Matsuo, J., Takaoka, G. H. and Yamada, I., Nucl. Instr. & Meth., B206 (2003) p. 902.Google Scholar
12. Kakuta, S., Seki, T., Sasaki, S., Furusawa, K., Aoki, T. and Matsuo, J., this issue (R9.36).Google Scholar