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Nanosecond and Femtosecond UV Laser Ablation of CdTe (100): Time-Of-Flight and Angular Distributions

Published online by Cambridge University Press:  22 February 2011

P.D. Brewer ,
M. Späth  and
M. Stuke
P.D. Brewer
Affiliation:
Max-Planck Institut für biophysikalische Chemie, Abteilung Laserphysik, Am Fassberg, D-3400 Göttingen, Germany
M. Späth
Affiliation:
Max-Planck Institut für biophysikalische Chemie, Abteilung Laserphysik, Am Fassberg, D-3400 Göttingen, Germany
M. Stuke
Affiliation:
Max-Planck Institut für biophysikalische Chemie, Abteilung Laserphysik, Am Fassberg, D-3400 Göttingen, Germany
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Abstract

Angularly resolved time-of-flight (TOF) measurements have been used to probe the velocity and angular distributions of Cd atoms and Te2 molecules ejected from CdTe (100) substrates under irradiation by 248 nm nanosecond and sub-picosecond laser pulses. These experiments employ a dye laser TOF mass spectrometer with resonance enhanced multiphoton ionization for sensitive, high resolution detection of the desorbed products. The velocity distributions are well described by Maxwell-Boltzmann distributions for low fluence nanosecond (<60 mJ/cm2) and sub-picosecond (<3.3 mJ/cm2) pulses. Angular flux distributions for nanosecond irradiation are observed to be highly forward peaked about the surface normal, whereas, for sub-picosecond irradiation the distribution approaches cos3θ.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 334: Symposium W – Gas-Phase and Surface Chemistry in Electronic Materials Processing , 1993 , 245
Copyright
Copyright © Materials Research Society 1994

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